R. Sharda, R. Jeffery, M. Martyniuk, R. Woodward, J. Dell, L. Faraone
{"title":"Plasma annealing as an effective method for the crystallization of bismuth iron garnet films","authors":"R. Sharda, R. Jeffery, M. Martyniuk, R. Woodward, J. Dell, L. Faraone","doi":"10.1109/COMMAD.2012.6472421","DOIUrl":null,"url":null,"abstract":"Oxygen plasma annealing was used to crystallise (BiDy)<sub>3</sub>(FeGa)<sub>5</sub>O<sub>12</sub> (Bi:DyIG) at a temperature of 515°C, which is over 100°C lower compared with conventional thermal annealing. We used a thermal imager to measure and characterise the temperature of the sample with respect to RF power and pressure inside a plasma chamber.","PeriodicalId":136573,"journal":{"name":"COMMAD 2012","volume":"27 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"COMMAD 2012","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/COMMAD.2012.6472421","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Oxygen plasma annealing was used to crystallise (BiDy)3(FeGa)5O12 (Bi:DyIG) at a temperature of 515°C, which is over 100°C lower compared with conventional thermal annealing. We used a thermal imager to measure and characterise the temperature of the sample with respect to RF power and pressure inside a plasma chamber.