High-Voltage Electrostatic Discharge Protection Device development in 28nm BCDLite Technology

Prantik Mahajan, Vishal Ganesan, N. Subramani, Ruchil Jain, S. Mitra, R. Gauthier
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Abstract

Best-in-class (BIC) High-Voltage (HV) Electrostatic Discharge (ESD) solutions for 8-12V power pad protection in first-of-its-kind GlobalFoundries® 28nm low-cost BCDLite process are evaluated. A comparative analysis between different types of devices, namely gate-grounded NMOS (GGNMOS), NPN, PNP and Diode, showing DC & 100ns Transmission Line Pulse (TLP) performance from Technology Computer-Aided Design (TCAD) simulations and silicon measurement results with performance metrics in terms of core device ESD protection effectiveness w.r.t Safe Operating Area (SOA) boundary and key Figures of Merit (FOMs) is elucidated.
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28nm BCDLite技术高压静电放电保护装置的研制
GlobalFoundries®28nm低成本BCDLite工艺中用于8-12V电源垫保护的同类最佳(BIC)高压(HV)静电放电(ESD)解决方案进行了评估。对栅极接地NMOS (GGNMOS)、NPN、PNP和二极管等不同类型器件进行了比较分析,从计算机辅助设计(TCAD)仿真和硅测量结果中得出直流和100ns传输线脉冲(TLP)性能指标,并从安全工作区(SOA)边界和关键性能指标(FOMs)的角度阐述了核心器件ESD保护有效性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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