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2022 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)最新文献

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LADA methodologies to localize embedded memory failure 定位嵌入式内存故障的LADA方法
B. Yeoh, M.H. Thor, L.S. Gan, Y. Chan, S. Goh
Dynamic Laser Stimulation (DLS) techniques have met with great success to debug integrated circuit (IC) soft failure. Laser assisted device alteration (LADA) is one of the DLS technique well-established to tackle speed-path failure and analysis of defect-free performance limiting circuits. In this work, we discuss atypical LADA analysis to localize system-on-chip (SOC) memory manufacturing soft and hard defects.
动态激光刺激(DLS)技术在集成电路软故障调试方面取得了巨大成功。激光辅助器件改造(Laser assisted device change, LADA)是一种成熟的DLS技术,用于解决速度路径故障和分析无缺陷性能限制电路。在这项工作中,我们讨论了非典型LADA分析来定位片上系统(SOC)存储器制造的软缺陷和硬缺陷。
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引用次数: 1
Semantic-Masked Intensity Augmentation for Deep Learning-based Analysis of FPGA Images 基于深度学习的FPGA图像分析的语义掩码强度增强
Deruo Cheng, Yee-Yang Tee, Jingsi Song, Yiqiong Shi, Tong Lin, B. Gwee
The emergence of data science and deep learning has enabled the automated recognition of circuit elements from the microscopic images of delayered Integrated Circuit (IC) devices, and has greatly improved the efficiency of overall functional analysis flow for hardware security. However, due to the high complexity of delayering the manufactured IC devices and the imaging imperfections in modern ICs, the acquired microscopic images usually contain unforeseeable variations even for the same types of circuit elements. As a result, the deep learning model which is typically trained with a very limited set of labelled images suffers from inefficacy on generalizing to unseen images, which further causes errors for subsequent analysis. Data augmentation techniques, which virtually introduce data variations and increase the data amount by applying different image transformations, are thus widely used during the training of deep learning models for IC image analysis. In this paper, we propose a Semantic-Masked Intensity Augmentation (SMIA) technique with a deep-learning-based framework to analyze the microscopic images acquired from a delayered Field-Programmable Gate Arrays (FPGA) device. Different from the commonly-used intensity augmentation techniques which apply transformations to the image pixels according to their original intensities, our proposed SMIA considers the semantic context of the image pixels by applying different intensity transformations according to pixel-level semantic masks. With experiments on segmenting metal lines from the metal layer images of a targeted FPGA, our proposed SMIA demonstrates better performance and higher stability than the existing intensity augmentation techniques.
数据科学和深度学习的出现使得从延迟集成电路(IC)器件的微观图像中自动识别电路元件成为可能,并大大提高了硬件安全整体功能分析流程的效率。然而,由于制造的集成电路器件分层的高度复杂性和现代集成电路中的成像缺陷,即使对于相同类型的电路元件,所获得的显微图像通常也包含不可预见的变化。因此,通常使用非常有限的标记图像集进行训练的深度学习模型在泛化到未见过的图像时效果不理想,这进一步导致后续分析的错误。数据增强技术通过应用不同的图像变换来引入数据变化并增加数据量,因此在IC图像分析的深度学习模型的训练中被广泛使用。在本文中,我们提出了一种基于深度学习框架的语义掩码强度增强(SMIA)技术,用于分析从延迟现场可编程门阵列(FPGA)设备获取的显微图像。与常用的强度增强技术根据图像像素的原始强度对其进行变换不同,我们提出的SMIA通过根据像素级语义掩模进行不同的强度变换来考虑图像像素的语义上下文。通过从目标FPGA的金属层图像中分割金属线的实验,我们提出的SMIA比现有的强度增强技术具有更好的性能和更高的稳定性。
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引用次数: 1
A scalable & comprehensive resilience concept against optical & physical IC backside attacks 针对光学和物理IC背后攻击的可扩展和全面弹性概念
N. Herfurth, E. Amini, M. Lisker, Jean-Pierre Seifert, C. Boit
IC security is not ensured until the chip backside is fully protected. This paper presents a comprehensive and VLSI-compatible protection structure to secure integrated circuits (ICs) against all types of physical and optical attacks targeting the IC via the chip backside. The novel method of protecting the IC structure is provided by outsourcing the protection scheme onto a dedicated protection wafer. This protection wafer is then irreversibly bonded to the IC. This process can be performed at wafer level, realising a VLSI-compatible protection scheme. An example integration based on the new approach is described and discussed in detail.The protection wafer consists of a highly doped silicon substrate forming an optical opaque layer. The protection wafer is irreversibly bonded to the IC and electrically contacted by through silicon vias (TSVs). Integrity of the wafer-stack is verified by an electro-optical process. The protection wafer contains several photon-emitting devices. Several p-n junctions on the circuit side of the protected IC sense the optical signals generated by the photon emitting devices on the protection wafer.
只有芯片背面得到充分保护,才能保证IC的安全性。本文提出了一种全面且兼容vlsi的保护结构,以保护集成电路(IC)免受通过芯片背面针对IC的各种物理和光学攻击。通过将保护方案外包到专用保护晶圆上,提供了保护IC结构的新方法。然后,该保护晶圆不可逆地连接到IC上。该过程可以在晶圆级执行,实现与vlsi兼容的保护方案。并对基于该方法的集成实例进行了详细的描述和讨论。该保护晶片由形成光学不透明层的高掺杂硅衬底组成。保护晶圆不可逆地连接到集成电路上,并通过硅过孔(tsv)进行电接触。通过光电工艺验证了晶圆堆的完整性。保护晶片包含几个光子发射器件。在被保护IC的电路侧的几个pn结检测由保护晶片上的光子发射器件产生的光信号。
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引用次数: 1
Photon Emission Microscopy of Amorphous HfO2 ReRAM Cells 非晶态HfO2 ReRAM细胞的光子发射显微镜研究
F. Stellari, L. Ocola, E. Wu, T. Ando, P. Song
In this paper, we study the photon emission from filaments formed in amorphous HfO2 Resistive Random-Access Memory (ReRAM) cells and compare it to previous results from crystalline cells. Both a CCD and an InGaAs camera are used to observe the photon emission in set/reset state using forward/reverse bias voltage. An electric field model and a uniform Poisson spatial distribution model can be used to model the photon emission on both types of cell types.
在本文中,我们研究了非晶HfO2电阻随机存取存储器(ReRAM)电池中形成的细丝的光子发射,并将其与先前晶体电池的结果进行了比较。利用CCD和InGaAs相机在正/反向偏置电压下观察光子在设置/复位状态下的发射情况。电场模型和均匀泊松空间分布模型可以用来模拟两种类型细胞上的光子发射。
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引用次数: 1
Optimizing EBAC / EBIRCH analysis in 5 nm technology 优化5nm技术的EBAC / EBIRCH分析
A. Rummel, Greg M. Johnson
An intentionally overstressed fin defect was created in 5 nm technology. EBIC analysis with 0.5 kV electron beam stimulation enabled early detection of the defect during overstress experiments. EBIRCH analysis, again at 0.5 kV was able to isolate the exact spot of the fail in a multi-fin device. Additional EBIC scans at various kVs were also able to isolate the failing fin, located close to the EBIRCH spot, and provided insights on how to use Monte Carlo scattering models to predict the optimal beam energy to find defects via EBIC. This approach could be applied to fails in 5 nm or systems with delicate structures.
在5nm技术中故意产生了一个过度强调的鳍缺陷。0.5 kV电子束刺激下的EBIC分析能够在超应力实验中早期发现缺陷。EBIRCH分析,同样在0.5 kV下,能够隔离出多鳍装置故障的确切位置。在不同kv下的额外EBIC扫描也能够隔离靠近EBIRCH点的失效鳍,并提供了如何使用蒙特卡罗散射模型来预测最佳光束能量以通过EBIC发现缺陷的见解。这种方法可以应用于5纳米或具有精细结构的系统的失败。
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引用次数: 0
From System to Package to Interconnect: An Artificial Intelligence Powered 3D X-ray Imaging Solution for Semiconductor Package Structural Analysis and Correlative Microscopic Failure Analysis 从系统到封装再到互连:用于半导体封装结构分析和相关微观失效分析的人工智能驱动3D x射线成像解决方案
A. Gu, M. Terada, H. Stegmann, Thomas Rodgers, C. Fu, Yanjing Yang
Non-destructive 3D X-ray microscopy (XRM) has played a crucial role in fueling the advances of IC package development and failure analysis [1]-[2]. Over the past decade, the industry has increasingly focused on packaging innovations to improve device performance. The emergence of numerous new 2.5D, 3D and recent heterogenous integration packages challenges the existing X-ray imaging and analysis techniques because IC interconnects are more densely packed in larger and thicker packages. It takes several hours or longer for a 3D X-ray scanner to acquire high resolution and quality images of fine-pitch interconnects and fault regions. In this report, we will introduce a deep learning high-resolution reconstruction (DLHRR) method through the implementation of trained neutral networks capable of improving scan speed by a factor of four. To demonstrate the effectiveness of this new method applied to the packaging hierarchy, an intact smartphone, several component modules, and embedded interconnectors will be imaged and reconstructed with the DLHRR method. With the improved efficiency of the AI powered X-ray imaging technique, a correlated fs-laser/FIB-SEM workflow followed to precisely target and analyze the deeply buried defects, which has been difficult, if not impossible, for conventional package FA techniques. We will discuss the DLHRR method and applications in two following workflows: X-ray imaging workflow for package structural analysis, and correlative X-ray and fs-laser/FIB-SEM workflow for package failure analysis.
非破坏性3D x射线显微镜(XRM)在推动IC封装开发和失效分析方面发挥了至关重要的作用[1]-[2]。在过去的十年中,该行业越来越关注封装创新,以提高设备性能。许多新的2.5D、3D和最近的异质集成封装的出现,挑战了现有的x射线成像和分析技术,因为IC互连在更大、更厚的封装中更加密集。三维x射线扫描仪需要几个小时或更长时间才能获得细间距互连和断层区域的高分辨率和高质量图像。在本报告中,我们将介绍一种深度学习高分辨率重建(DLHRR)方法,通过实施训练有素的中性网络,能够将扫描速度提高四倍。为了证明这种新方法应用于封装层次结构的有效性,将使用DLHRR方法对完整的智能手机、几个组件模块和嵌入式互连器进行成像和重构。随着人工智能驱动的x射线成像技术效率的提高,相关的fs-laser/FIB-SEM工作流程遵循精确定位和分析深埋缺陷,这对于传统的封装FA技术来说是困难的,如果不是不可能的话。我们将讨论DLHRR方法及其在以下两个工作流程中的应用:用于封装结构分析的x射线成像工作流程,以及用于封装失效分析的相关x射线和fs-laser/FIB-SEM工作流程。
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引用次数: 2
Chain diagnosis as a tool for yield ramp in advanced process nodes 链式诊断作为先进工艺节点产量斜坡的工具
Jayant D'Souza
Scan chains form a critical part of the test structures on digital designs. Chain diagnosis is commonly used in early yield ramp to root cause process issues. Recent advancements in chain diagnosis can not only improve chain diagnosis resolution but also provide more directed and meaningful information for failure analysis and fault isolation. This paper covers the basics of chain diagnosis and some recent technology advancements in chain diagnosis that have been leveraged in advanced process nodes below 7nm.
扫描链是数字化设计中测试结构的重要组成部分。链式诊断通常用于早期产量下降的根本原因工艺问题。链式诊断技术的最新进展不仅提高了链式诊断的分辨率,而且为故障分析和故障隔离提供了更有针对性和更有意义的信息。本文涵盖了链式诊断的基础知识和链式诊断的一些最新技术进展,这些技术已被用于7nm以下的先进工艺节点。
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引用次数: 0
In situ transmission electron microscope study of reliability in molybdenum disulfide based strain sensors 二硫化钼应变传感器可靠性的原位透射电镜研究
C. Luo, Chaolun Wang, Shuo Ma, F. Liang, Zeiwei Luo, Xing Wu, J. Chu
Reliability of flexible device under external strain is an important issue. The clarification of complex evolution of structure under external strain is critical for basic physical understanding and reliability improvement. However, lack of the direction of the evolution process and the construction of the relationship between structure and electrical properties, the failure mechanism of flexible device remains controversial. Here, in situ transmission electron microscope (TEM) is used to directly observe the structural evolution during stretching and compression process in MoS2 based strain sensor. Through the analysis of the relationship between electrical properties and structure, the interfacial structure related gradual and abrupt resistance changes are observed. The formation of twisted and defected MoS2 layers during stretching process is important. The formed twisted MoS2 layers changes the current path, the resistance changes continuously. Then, the MoS2 is mechanically peeled off into two separate individuals, and the twisted MoS2 at the interface is removed in situ. By controlling the distance between two separate MoS2, the current has a sudden change. The in situ electrical TEM experiment clarified the relationship between the current (resistance) and the interface structure. It provides the experimental basis for the understanding of complex evolution mechanism under external strain, which is important for reliability of flexible device.
外应变作用下柔性装置的可靠性是一个重要问题。弄清结构在外部应变作用下的复杂演化过程,对于提高结构的基本物理认识和可靠性至关重要。然而,由于缺乏演化过程的方向和结构与电性能关系的构建,柔性器件的失效机理仍存在争议。本文利用原位透射电镜(TEM)直接观察了MoS2应变传感器在拉伸和压缩过程中的结构演变。通过分析电学性能与结构的关系,观察到与界面结构相关的逐渐和突然的电阻变化。在拉伸过程中形成扭曲和缺陷的二硫化钼层是重要的。形成的扭曲二硫化钼层改变了电流路径,电阻连续变化。然后,二硫化钼被机械剥离成两个独立的个体,在界面处扭曲的二硫化钼被原位去除。通过控制两个独立MoS2之间的距离,电流有一个突然的变化。原位电透射电镜实验明确了电流(电阻)与界面结构的关系。为理解外应变作用下的复杂演化机理提供了实验依据,对提高柔性装置的可靠性具有重要意义。
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引用次数: 1
Nanoscale Conductivity Mapping: Live Imaging of Dielectric Breakdown with STEM EBIC 纳米尺度电导率映射:电介质击穿的实时成像与STEM EBIC
W. Hubbard, J. Lodico, H. Chan, M. Mecklenburg, B. Regan
Dielectric breakdown (DB) is central to the failure and function of modern and next-generation computing components. Despite its importance in microelectronics, the specific mechanisms leading to DB are poorly understood. Electrical testing provides little spatial information about the small-scale effects that precede breakdown. High resolution imaging techniques, such as transmission electron microscopy (TEM), have the requisite resolution but are almost exclusively used to study the post-mortem effects of catastrophic DB. In this study we present techniques to directly visualize DB in nanoscale devices with scanning TEM electron beam-induced current (STEM EBIC) imaging. STEM EBIC imaging maps local conductivity and electric field with high contrast. In HfO2-based resistive memory (RRAM) devices, a data bit is stored as a conductive path formed via controlled, reversible DB. With STEM EBIC we image Ti/HfO2/Pt devices capable of switching repeatedly in situ. Distinct regions of soft and hard dielectric breakdown are observed at different phases of RRAM cycling. These results suggest a model where DB occurs on a progressive continuum between hard and soft breakdown.
介质击穿(DB)是现代和下一代计算组件故障和功能的核心。尽管它在微电子学中很重要,但导致DB的具体机制却知之甚少。关于击穿前的小规模效应,电测试提供的空间信息很少。高分辨率成像技术,如透射电子显微镜(TEM),具有必要的分辨率,但几乎专门用于研究灾难性DB的死后影响。在这项研究中,我们提出了用扫描透射电镜电子束感应电流(STEM EBIC)成像直接显示纳米级器件中DB的技术。STEM EBIC成像以高对比度绘制局部电导率和电场。在基于hfo2的电阻存储器(RRAM)器件中,数据位被存储为通过受控可逆DB形成的导电路径。利用STEM EBIC,我们成像了能够在原位重复切换的Ti/HfO2/Pt器件。在RRAM循环的不同阶段观察到不同的软、硬介质击穿区域。这些结果表明,DB发生在硬击穿和软击穿之间的渐进连续体中。
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引用次数: 0
Investigation on Board-Level CDM in SSD Products and Replication of Line ESD Phenomena 固态硬盘产品板级CDM及线路静电放电现象的研究
Jungho Jin, Youngbong Han, Byung-Il Kown, Iloh Jang, N. Lee, Seungbae Lee, Yuchul Hwang, Hoosung Kim, S. Pae
Component-level charged device model (CDM) test method compliant with JS-002 is a good method to represent electro static discharge (ESD) failures of semiconductors. The CDM test method is useful to represent the ESD immunity of components constituting the system. However, there are factors that affect ESD immunity besides components in the system, it is important to verify ESD immunity in the system-level. In this paper, board-level CDM test method for solid state drives (SSDs) was proposed. This method can be used as a complementary method for system-level ESD test. A test environment suitable for SSD was set up using component-level CDM test equipment to reproduce ESD failure during assembly and test processes. The root-cause of the ESD failure is CDM damage caused by fast charge transfer between SSDs and adjacent objects. When SSD is combined with the equipment for electrical test, rapid charge transfer occurs through the metallic part of the SSD. A momentary voltage rise occurs at a specific node of semiconductors in SSD, and failure can be occurred. A failure of SSDs in assembly and test line was effectively replicated and root-cause identified and fixed.
符合jis -002标准的元件级带电器件模型(CDM)测试方法是表征半导体静电放电(ESD)故障的良好方法。CDM测试方法可用于表征构成系统的元器件的ESD抗扰度。但是,除系统内部元器件外,还有其他因素影响ESD抗扰度,因此从系统层面对ESD抗扰度进行验证十分重要。提出了固态硬盘的板级CDM测试方法。该方法可作为系统级ESD测试的补充方法。利用组件级CDM测试设备建立适合SSD的测试环境,重现组装和测试过程中的ESD故障。导致ESD失效的根本原因是由于ssd盘与邻近物体之间的快速电荷传输导致CDM损坏。当SSD与设备结合进行电气测试时,通过SSD的金属部分会发生快速的电荷传递。在固态硬盘中,半导体的某一特定节点出现瞬间电压上升,可能导致故障。ssd在组装和测试线上的故障被有效地复制,并确定和修复了根本原因。
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引用次数: 0
期刊
2022 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
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