Polymer strip-loaded waveguides on ALD-TiO2 films

Abstract

We propose and demonstrate a low cost, large area, and mass production compatible method to fabricate strip-loaded waveguide structures. The structure is fabricated by combination of Atomic Layer Deposition and replication technique without applying any etching process to form the strip. The waveguide was realized in ring resonator configuration which eases the characterization process. The guiding layer is a 200 nm-thick TiO2 layer integrated with polymer strips to load light in the high index thin film. Due to the characteristic of the applied fabrication technique, achieving a very low propagation losses is expected.