Effect of Misfit Strain Relaxation on Nonlinear Dielectric Properties of Epitaxial (Ba0.60 Sr0.40) Thin Films on NdGaO3

W. Simon, E. K. Akdoğan, A. Safari
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Abstract

Strain relaxation in (Ba0.60 Sr0.40)TiO3 epitaxial films on <110>-oriented NdGaO3 substrates is investigated in the thickness range, h= 25-1200 nm. The BST films prepared by PLD show that residual strains mostly relax by h~200 nm, and for h>600 nm films are essentially strain free. Two independent dislocation mechanisms operate to relax anisotropic strains along the principal directions. The critical thickness for misfit dislocation formation along [001] and [010] were found to be 11 and 15 nm, respectively. Deviation from linear elasticity for h<200 was observed, and increased as thickness decreased. Films with h<25 nm are monoclinic due to a finite principal shear stress along [110] of the BST cell. The effects of misfit strain relaxation on the nonlinear dielectric response and tunability will be discussed as well. The in plane dielectric response demonstrates a directional dependence that increases with the magnitude of the residual strain.
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失配应变弛豫对NdGaO3外延(Ba0.60 Sr0.40)薄膜非线性介电性能的影响
研究了(Ba0.60 Sr0.40)TiO3外延薄膜在定向nd高岭土衬底上的应变弛豫,厚度范围为25 ~ 1200 nm。PLD制备的BST薄膜的残余应变主要在h~200 nm范围内松弛,而在h>600 nm范围内基本没有应变。两个独立的位错机制使各向异性应变沿主方向松弛。沿[001]和[010]形成错配位错的临界厚度分别为11 nm和15 nm。当h<200时,与线弹性的偏差随着厚度的减小而增大。由于沿BST细胞[110]的主剪应力有限,h<25 nm的薄膜是单斜的。本文还讨论了非拟合应变松弛对非线性介质响应和可调性的影响。平面内介电响应表现出随残余应变的大小而增加的方向依赖性。
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