N. Krishnan, M. Martyniuk, R. Jeffery, R. Woodward, J. Dell, L. Faraone
{"title":"Control of chemical composition of rare-earth substituted iron garnets using biased target deposition","authors":"N. Krishnan, M. Martyniuk, R. Jeffery, R. Woodward, J. Dell, L. Faraone","doi":"10.1109/COMMAD.2012.6472377","DOIUrl":null,"url":null,"abstract":"Rare earth cerium substituted europium iron garnets (CeEu)3(FeGa)5O12 (Ce:EIG) as well as the elemental oxides were deposited on fused quartz substrates using Biased Target Deposition (BTD). The Ce:EIG films are prepared at low temperature (80-120°C) by sputtering four metallic targets simultaneously using a low energy ion beam. This method provides control over the material composition in a predictable way by controlling the bias duty cycle on individual targets.","PeriodicalId":136573,"journal":{"name":"COMMAD 2012","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"COMMAD 2012","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/COMMAD.2012.6472377","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
Rare earth cerium substituted europium iron garnets (CeEu)3(FeGa)5O12 (Ce:EIG) as well as the elemental oxides were deposited on fused quartz substrates using Biased Target Deposition (BTD). The Ce:EIG films are prepared at low temperature (80-120°C) by sputtering four metallic targets simultaneously using a low energy ion beam. This method provides control over the material composition in a predictable way by controlling the bias duty cycle on individual targets.
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