S. Yegnanarayanan, W. Roman, M. Soltani, G. Cremona, Hang Lu, A. Adibi
{"title":"On-chip Integration of Microfluidic Channels with Ultra-high Q Silicon Microdisk Resonators for Lab-on-a-Chip Sensing Applications","authors":"S. Yegnanarayanan, W. Roman, M. Soltani, G. Cremona, Hang Lu, A. Adibi","doi":"10.1109/LEOS.2007.4382269","DOIUrl":null,"url":null,"abstract":"This study demonstrates the design, fabrication, and characterization of a sensing platform based on the on-chip integration of such silicon-based microdisk resonators (with ultra high Q > 106) with microfluidic channels for sample delivery. Tuning of the resonance features using fluid in upper-cladding as well as applications in lab-on-a-chip sensing are reported.","PeriodicalId":110592,"journal":{"name":"LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings","volume":"734 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-11-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"8","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/LEOS.2007.4382269","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 8
Abstract
This study demonstrates the design, fabrication, and characterization of a sensing platform based on the on-chip integration of such silicon-based microdisk resonators (with ultra high Q > 106) with microfluidic channels for sample delivery. Tuning of the resonance features using fluid in upper-cladding as well as applications in lab-on-a-chip sensing are reported.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
