From simulations to masks for a BioFET design

Abstract

This paper presents the TCAD techniques used for the simulation, optimisation and design of the BioFET device parameters, using a specialised software package, ATLAS. The values of these parameters will prescribe the process fabrication and device size. Using EDA tools like LEDIT, the layers that will constitute the fabrication masks for both active and reference devices will be established, as a first novelty of this paper. A biodevice description in Atlas program, including an enzyme within the gate space, represents a second original approach. Besides to the simulations and mask design, the paper exposes some comparative experimental results concerning a nanostructured material, suitable for the enzyme entrapping.