M. Kadlecíková, J. Breza, M. Veselý, V. Luptáková, F. Balon, A. Vojacková, J. Král, J. Janı́k, A. Kromka
{"title":"Stimulation of diamond growth on optically transparent non-conductive substrates","authors":"M. Kadlecíková, J. Breza, M. Veselý, V. Luptáková, F. Balon, A. Vojacková, J. Král, J. Janı́k, A. Kromka","doi":"10.1109/ASDAM.2002.1088515","DOIUrl":null,"url":null,"abstract":"Diamond layers have been deposited by hot filament CVD on sapphire and glass substrates pre-treated by diamond grain seeding and by AC biasing. The quality of diamond layers has been evaluated by Raman spectroscopy. Diamond layers of different quality have been obtained as confirmed by detecting various Raman bands attributable to different forms of carbon.","PeriodicalId":179900,"journal":{"name":"The Fourth International Conference on Advanced Semiconductor Devices and Microsystem","volume":"31 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-12-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"The Fourth International Conference on Advanced Semiconductor Devices and Microsystem","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ASDAM.2002.1088515","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Diamond layers have been deposited by hot filament CVD on sapphire and glass substrates pre-treated by diamond grain seeding and by AC biasing. The quality of diamond layers has been evaluated by Raman spectroscopy. Diamond layers of different quality have been obtained as confirmed by detecting various Raman bands attributable to different forms of carbon.
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