Micro-step XY-stage using piezoelectric tube actuator

Abstract

A novel small and simple mu m-order-step XY-stage has been developed. It consists of a cylindrical piezoelectric actuator fixed at one end to a baseplate, with one electrode inside the tube and two pairs of diametrical electrodes on the outside. A support is attached to the free end. The actuator is powered by a single cosine waveform voltage by friction force. An analysis shows that the trajectory of the substance is determined by the parameter gamma = alpha omega /sup 2//( mu g), which has no relation to its weight, where alpha is the amplitude of the support stroke, omega is the angular frequency of the single wave, mu is the friction coefficient, and g is the gravity. The final displacement of the substance has its maximum at x/sub 5//(2 alpha )=0.626 when gamma =3.76. The actuator drives the substance on the support two-dimensionally. The stroke and direction of movement are controlled with a joystick.<>