Shengqiang Xu, Xin Guo, Yuan Dong, Wei Wang, Hong Wang, X. Gong, Y. Yeo
{"title":"Si-on-insulator grating coupler operating at 2 μιη: Device design, fabrication, and characterization","authors":"Shengqiang Xu, Xin Guo, Yuan Dong, Wei Wang, Hong Wang, X. Gong, Y. Yeo","doi":"10.23919/SNW.2017.8242318","DOIUrl":null,"url":null,"abstract":"Grating coupler based on 220 nm Si-on-insulator (SOI) substrate was designed and optimized for operation at 2 μm wavelength targeting telecommunication application. Decent coupling efficiency of around 18% is achieved, which is consistent with the simulation results and can be employed in 2 μτη-based photonic integrated circuit.","PeriodicalId":424135,"journal":{"name":"2017 Silicon Nanoelectronics Workshop (SNW)","volume":"56 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 Silicon Nanoelectronics Workshop (SNW)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/SNW.2017.8242318","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Grating coupler based on 220 nm Si-on-insulator (SOI) substrate was designed and optimized for operation at 2 μm wavelength targeting telecommunication application. Decent coupling efficiency of around 18% is achieved, which is consistent with the simulation results and can be employed in 2 μτη-based photonic integrated circuit.
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