{"title":"Micro-diaphragm performance analysis for polyimide diaphragm","authors":"K. Hasikin, N. Soin, F. Ibrahim","doi":"10.1109/SMELEC.2010.5549367","DOIUrl":null,"url":null,"abstract":"This paper presents a micro-diaphragm performance analysis for optical sensor for human pulse pressure detection. The effect of diaphragm radius and diaphragm thickness on the static and frequency responses were investigated. It can be concluded that the polyimide micro-diaphragm with a radius of 90µm and thickness of 4µm has achieved the optimum performance in term of the sensitivity, flexural rigidity and resonance frequency.","PeriodicalId":308501,"journal":{"name":"2010 IEEE International Conference on Semiconductor Electronics (ICSE2010)","volume":"57 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-06-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 IEEE International Conference on Semiconductor Electronics (ICSE2010)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMELEC.2010.5549367","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This paper presents a micro-diaphragm performance analysis for optical sensor for human pulse pressure detection. The effect of diaphragm radius and diaphragm thickness on the static and frequency responses were investigated. It can be concluded that the polyimide micro-diaphragm with a radius of 90µm and thickness of 4µm has achieved the optimum performance in term of the sensitivity, flexural rigidity and resonance frequency.
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