{"title":"Temperature stability of surface acoustic wave resonators on the in-plane rotated 33/spl deg/Y-cut quartz","authors":"S. Kanna, K. Iizawa, T. Yamazaki, M. Takagi","doi":"10.1109/ULTSYM.2002.1193362","DOIUrl":null,"url":null,"abstract":"We present surface acoustic wave resonators on the in-plane rotated 33/spl deg/Y-cut quartz with improved temperature stability. We calculate the frequency temperature characteristics of Rayleigh waves using finite element method under the condition of Euler angle (0, 123, 39-44). We confirmed the accuracy of calculated temperature coefficients by experiments. We also measured the resonance characteristics of prototype SAW resonators.","PeriodicalId":378705,"journal":{"name":"2002 IEEE Ultrasonics Symposium, 2002. Proceedings.","volume":"30 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2002 IEEE Ultrasonics Symposium, 2002. Proceedings.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ULTSYM.2002.1193362","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 7
Abstract
We present surface acoustic wave resonators on the in-plane rotated 33/spl deg/Y-cut quartz with improved temperature stability. We calculate the frequency temperature characteristics of Rayleigh waves using finite element method under the condition of Euler angle (0, 123, 39-44). We confirmed the accuracy of calculated temperature coefficients by experiments. We also measured the resonance characteristics of prototype SAW resonators.
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