{"title":"Control of the Deposition Ratio of Bi2Te3 and Sb2 Te3 in a Vacuum Evaporator for fabrication of Peltier Elements","authors":"L. Gonçalves, J. G. Rocha, J. Correia, C. Couto","doi":"10.1109/ISIE.2006.296053","DOIUrl":null,"url":null,"abstract":"This article reports the main problem and the corresponding solution of the co-evaporation of Bi2Te3 and Sb 2Te3 films for the fabrication of Peltier elements. This main problem consists in the control of the deposition rates of the two elements: Bi or Sb and Te, which have very different vapor pressures. The control of the deposition ratio was achieved by means of a PID controller, which permitted the fabrication of thin-film Peltier elements that produce a temperature gradient in the order of 2degC between their hot and cold junctions, when measured at free air conditions","PeriodicalId":296467,"journal":{"name":"2006 IEEE International Symposium on Industrial Electronics","volume":"27 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 IEEE International Symposium on Industrial Electronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISIE.2006.296053","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5
Abstract
This article reports the main problem and the corresponding solution of the co-evaporation of Bi2Te3 and Sb 2Te3 films for the fabrication of Peltier elements. This main problem consists in the control of the deposition rates of the two elements: Bi or Sb and Te, which have very different vapor pressures. The control of the deposition ratio was achieved by means of a PID controller, which permitted the fabrication of thin-film Peltier elements that produce a temperature gradient in the order of 2degC between their hot and cold junctions, when measured at free air conditions
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