Micron-Scale Electrostatic Charged-Particle Guides: Analysis and Simulation

Abstract

We study charged-particle guiding structures based on periodic arrangements of microfabricated electrostatic lenses. Specifically, we analyze such electrostatic guiding structures via a transfer matrix approach, and we uncover the stability criteria and the beam transport properties of these guides. Furthermore, we present a planar guide design that is amenable to modern microfabrication, and we demonstrate, via simulation, that this guide is capable of confining energetic, keV-scale electron beams over extended lengths.