{"title":"CARS DIAGNOSTIC ON A PHOTOCHEMICAL REACTOR FOR IR LASER INDUCED PRODUCTION OF Si AND Si3N4 POWDERS","authors":"R. Fantoni, F. Bijnen, N. Djurić, S. Piccirillo","doi":"10.1155/LC.11.13","DOIUrl":null,"url":null,"abstract":"In a flow reactor a low power (up to 50 W) CW CO2 laser tuned at 944,19 cm−1 has been focussed in order \nto produce Si and Si3N4 ultrafine powders from SiH4 and SiH4/NH3 mixtures.","PeriodicalId":296295,"journal":{"name":"Laser Chemistry","volume":"106 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Laser Chemistry","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1155/LC.11.13","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
In a flow reactor a low power (up to 50 W) CW CO2 laser tuned at 944,19 cm−1 has been focussed in order
to produce Si and Si3N4 ultrafine powders from SiH4 and SiH4/NH3 mixtures.
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