Space-charge distributions in electron-beam charged Mylar and Kapton films

J. West, H. Wintle, A. Berraissoul, G. Sessler
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引用次数: 1

Abstract

The laser-induced pressure pulse method was used to determine space-charge distributions in 22- mu m films charged with 10 to 40 keV electron beams. For relatively low deposited-charge densities corresponding to surface potentials below 300 V, two charge layers develop, one at the surface of the samples and one at a depth corresponding approximately to the electron range. For higher deposited-charge densities, when breakdown in the surrounding air occurs during pressurization, the surface-charge layer is positive. For deposited-charge densities in excess of 1 mu C/cm/sup 2/, the space-charge layer is broader and, in Kapton, located deeper than for smaller charge densities. Heating of the samples to 110 degrees C reduced the charge without broadening the charge layers.<>
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电子束带电聚酯薄膜和卡普顿薄膜中的空间电荷分布
采用激光诱导压力脉冲法测定了22 μ m薄膜在10 ~ 40 keV电子束下的空间电荷分布。对于相对较低的沉积电荷密度,对应于低于300 V的表面电位,形成两个电荷层,一个在样品表面,另一个在大约对应于电子范围的深度。对于较高的沉积电荷密度,当加压过程中周围空气发生击穿时,表面电荷层为正。对于沉积电荷密度超过1 μ C/cm/sup 2/时,空间电荷层更宽,在Kapton中,比较小电荷密度时位于更深的位置。将样品加热到110℃时,电荷减少,而电荷层没有变宽
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