Aluminum top-gate ZnO nanowire transistors with improved transconductance

D. Kalblein, B. Fenk, K. Hahn, U. Zschieschang, K. Kern, H. Klauk
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Abstract

Field-effect transistors (FETs) based on semiconducting nanowires are potentially useful to replace thin-film transistors (TFTs) in active-matrix displays, since the larger mobility and smaller footprint of nanowire FETs compared with a-Si:H and organic TFTs provide faster pixel charging and larger aperture ratio. Nanowire growth often requires high temperatures, but if the nanowires can be grown on a temperature-compatible substrate and then be transferred to the target substrate for FET fabrication, and if the temperature during FET fabrication is below ∼150 °C, nanoscale FETs can be fabricated on polymeric substrates for flexible displays.
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具有改进跨导性的铝顶栅ZnO纳米线晶体管
基于半导体纳米线的场效应晶体管(fet)有可能取代有源矩阵显示器中的薄膜晶体管(tft),因为与a-Si:H和有机tft相比,纳米线fet具有更大的迁移率和更小的占地面积,可以提供更快的像素充电和更大的孔径比。纳米线的生长通常需要高温,但如果纳米线可以在温度兼容的衬底上生长,然后转移到FET制造的目标衬底上,并且如果FET制造过程中的温度低于~ 150°C,则可以在聚合物衬底上制造纳米级FET用于柔性显示器。
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