Silicon micromachined mass filter for a low power, low cost quadrupole mass spectrometer

Abstract

This article considers the design, realisation and initial tests of a quadrupole mass spectrometer with a novel silicon micromachined mass filter. The construction of this device is discussed along with its mounting on a conventional ion source and testing in a vacuum system. Results are presented for the operation of this mass lens including a mass spectrum, and the effect of cage voltage, emission current and pressure on the performance.