Application of cathodoluminescence microscopy to the study of native acceptors in gallium antimonide

J. Piqueras, B. Méndez, G. Panin, P. Dutta, E. Dieguez
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Abstract

Cathodoluminescence in the scanning electron microscope is used to investigate growth and process induced defects in GaSb crystals. In particular, luminescence emission has been used to study the nature of acceptor defects present after different annealing and irradiation treatments.
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阴极发光显微镜在锑化镓天然受体研究中的应用
利用扫描电子显微镜下的阴极发光技术研究了GaSb晶体中生长缺陷和工艺缺陷。特别地,发光发射已经被用来研究不同退火和辐照处理后受体缺陷的性质。
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