System of determination of electro - physical, physical - Chemical properties and gas - sensitive characteristics of semiconductor layers of oxides in frequency area
{"title":"System of determination of electro - physical, physical - Chemical properties and gas - sensitive characteristics of semiconductor layers of oxides in frequency area","authors":"N. Poluyanovich, M. Dubyago, V. V. Matsiborko","doi":"10.1109/EDM.2012.6310269","DOIUrl":null,"url":null,"abstract":"The installation for determination of electro-physical and physical - chemical properties of gas - sensitive materials (GSM) by means of measurement of electric parameters of an equivalent electric circuit was developed. Installation, for measurement of an electric impedance on frequencies by 1 MHz in a range of 100 Ohm ... 5 mega ohms is described . Stages of research of gas -sensitive properties of nano - composite materials and processes proceeding in them, for selection of the best GSM for gas sensors are described. Structures of impedance models are offered and prospects of their use for gas sensors are proved.","PeriodicalId":347076,"journal":{"name":"International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices","volume":"8 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-07-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EDM.2012.6310269","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
The installation for determination of electro-physical and physical - chemical properties of gas - sensitive materials (GSM) by means of measurement of electric parameters of an equivalent electric circuit was developed. Installation, for measurement of an electric impedance on frequencies by 1 MHz in a range of 100 Ohm ... 5 mega ohms is described . Stages of research of gas -sensitive properties of nano - composite materials and processes proceeding in them, for selection of the best GSM for gas sensors are described. Structures of impedance models are offered and prospects of their use for gas sensors are proved.
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