A novel pneumatic actuator system realised by microelectro-discharge machining

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176 Pub Date : 1998-01-25 DOI:10.1109/MEMSYS.1998.659747

T. Hirata, T. Akashi, A. Bertholds, Hans-Peter Gruber, A. Schmid, M. Gretillat, O. Guenat, N. F. D. Rooij

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引用次数: 22

Abstract

This paper presents a one-dimensional pneumatic actuator fabricated by combining several micromachining technologies such as microelectro-discharge machining (micro-EDM) as well as isotropic and anisotropic wet-etching. Unlike the existing pneumatic actuators, which usually convey the object by means of friction, this device employs the dynamic pressure of inclined driving jets in order to enhance the horizontal transportation performance. Typical slider speeds of 4 to 5 cm/s can be obtained. Comparisons are presented between different types of sliders. By an appropriate patterning of the slider bottom surface, the speed could be increased by 50% to 60%. Similarly a maximum tangential force of 20 /spl mu/N was obtained using this dynamic pressure concept. The latter is about two times larger than that of a slider with a smooth surface.

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一种采用微细电火花加工实现的新型气动执行机构系统

结合微电火花加工(micro-EDM)、各向同性和各向异性湿蚀刻等多种微加工技术，制作了一种一维气动执行器。与现有气动执行器通常通过摩擦来输送物体不同，该装置利用倾斜驱动射流的动压力来提高水平输送性能。可获得4至5厘米/秒的典型滑块速度。比较了不同类型的滑块。通过对滑块底表面进行适当的图案处理，速度可提高50% ~ 60%。同样，使用这种动态压力概念，得到的最大切向力为20 /spl mu/N。后者大约是光滑表面滑块的两倍大。

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Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176

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