{"title":"Staggered mode MEMS gyroscope","authors":"Ashraf Mahmoud, W. Fikry, Y. Sabry, M. Mahmoud","doi":"10.1109/JEC-ECC.2016.7518978","DOIUrl":null,"url":null,"abstract":"This paper presents a novel design concept of a MEMS gyroscope comprising a sense mode with a staggered frequency response. Considering a two-degree of freedom sense-mode structure, the bandwidth is enhanced by more than 40%. A post-fabrication electrostatic tuning mechanism based on two tuning electrodes is proposed to achieve resonance frequency trimming. The concept is applied on the design and analysis of fully decoupled gyroscope based on the SOI MUMPS process and operating around a resonance frequency of 5 kHz. The concept is extendable for multi-degree of freedom for wider bandwidth extension.","PeriodicalId":362288,"journal":{"name":"2016 Fourth International Japan-Egypt Conference on Electronics, Communications and Computers (JEC-ECC)","volume":"63 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 Fourth International Japan-Egypt Conference on Electronics, Communications and Computers (JEC-ECC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/JEC-ECC.2016.7518978","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5
Abstract
This paper presents a novel design concept of a MEMS gyroscope comprising a sense mode with a staggered frequency response. Considering a two-degree of freedom sense-mode structure, the bandwidth is enhanced by more than 40%. A post-fabrication electrostatic tuning mechanism based on two tuning electrodes is proposed to achieve resonance frequency trimming. The concept is applied on the design and analysis of fully decoupled gyroscope based on the SOI MUMPS process and operating around a resonance frequency of 5 kHz. The concept is extendable for multi-degree of freedom for wider bandwidth extension.
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