New micro stereo lithography for freely movable 3D micro structure-super IH process with submicron resolution

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176 Pub Date : 1998-01-25 DOI:10.1109/MEMSYS.1998.659770

Koji Ikuta, Shoji Maruo, S. Kojima

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引用次数: 72

Abstract

We have developed a drastically advanced micro stereo lithography named "Super IH process". It is the most unique feature of this process that liquid UV (Ultra Violet) polymer can be solidified at a pinpoint position in 3D space by optimizing apparatus and focusing condition of the laser beam. This pinpoint exposure enables us to make real 3D micro structure without any support parts nor sacrificial layers. Therefore freely movable micro mechanism such as gear rotators and free connected chains can be made easily. Moreover, several problems which conventional micro stereo lithography has are completely solved. Submicron fabrication resolution has first achieved by simple desk top apparatus. Since total fabrication time of the super IH process is extremely fast, it is easy to apply to mass productive 3D micro fabrication process.

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可自由移动三维微结构的新型微立体光刻技术——亚微米分辨率超IH工艺

我们开发了一种非常先进的微型立体光刻技术，名为“超级IH工艺”。该工艺最独特的特点是，通过优化设备和激光聚焦条件，可以将液态UV聚合物固化在三维空间的精确位置。这种精确的曝光使我们能够在没有任何支撑部件和牺牲层的情况下制作真正的3D微观结构。因此，可以很容易地制造出齿轮旋转器和自由连接链等可自由移动的微机构。此外，还彻底解决了传统微立体光刻技术存在的几个问题。亚微米制造分辨率首先是通过简单的桌面设备实现的。由于超级IH工艺的总制造时间非常快，因此易于应用于批量生产的3D微加工工艺。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176

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