S. Mandal, Subhrajit Sikdar, R. Saha, A. Karmakar, S. Chattopadhyay
{"title":"Investigating the impact of growth time on the electrical performance of vapour-liquid-solid (VLS) grown Ge/n-Si hetero-junction","authors":"S. Mandal, Subhrajit Sikdar, R. Saha, A. Karmakar, S. Chattopadhyay","doi":"10.1109/ISDCS49393.2020.9262999","DOIUrl":null,"url":null,"abstract":"In this paper, a high-quality crystalline Ge thin film (~10 nm) is grown on n-Si substrate by employing vapour-liquid-solid (VLS) method. The crystalline quality and the film thickness are measured by XRD and spectroscopic ellipsometry experiments, respectively. The current-voltage characteristics of the Ge/n-Si hetero-junction device are measured and the impact of growth time on the rectification properties is studied.","PeriodicalId":177307,"journal":{"name":"2020 International Symposium on Devices, Circuits and Systems (ISDCS)","volume":"59 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-03-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 International Symposium on Devices, Circuits and Systems (ISDCS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISDCS49393.2020.9262999","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
In this paper, a high-quality crystalline Ge thin film (~10 nm) is grown on n-Si substrate by employing vapour-liquid-solid (VLS) method. The crystalline quality and the film thickness are measured by XRD and spectroscopic ellipsometry experiments, respectively. The current-voltage characteristics of the Ge/n-Si hetero-junction device are measured and the impact of growth time on the rectification properties is studied.