R. Sawada, H. Tanaka, O. Ohguchi, J. Shimada, S. Hara
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引用次数: 31
Abstract
A novel integrated optical micro-encoder based on diffraction is presented, which can measure the relative distance traveled against a grating (scale) in the grating vector direction. A measurement resolution of less than 0.01 mu m is possible. The encoder is extremely small, only 500- mu m square, which is 1/100 the size of conventional encoders. Therefore, the encoder can be incorporated into a micro-machine and can be moved at high speed, since its inertia is extremely low. This encoder can be used even when the gap between the encoder and the grating is a few hundred micrometers.<>
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