Measurements and predictions of SAW parameters and device performance on LGT-X substrates

Abstract

SAW material parameters have been extracted for LGT X-cut material at various propagation angles. The extracted parameters of velocity, coupling and TCD give good correlation to predicted results based on fundamental LGT material measurements previously reported. SAW delay lines, resonators and transversely coupled resonator (TCR) have been fabricated and the initial results from experiments are presented. The results indicate that the LGT material parameters previously reported will yield reliable predictions, although the precise temperature effects are not at the same level of refinement as in quartz. Based on device results, the current LGT material used is of a high quality and suitable for SAW device applications.