4H-SiC Junction Barrier Schottky Diodes and Power MOSFETs with High Repetitive UIS Ruggedness

Amaury Gendron-Hansen, D. Sdrulla, A. Kashyap, B. Odekirk, W. Brower, L. Thornhill
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引用次数: 3

Abstract

A test procedure for repetitive unclamped inductive switching (R-UIS) is presented and the results are reported for state-of-the-art 4H-SiC Schottky barrier diodes (SBDs) and MOSFETs. The energies at failure are 8.3, 8.9, and 10.3 J/cm2 for SBD parts rated to 700, 1200, and 1700 V, respectively. The cumulative thermal effects are intentionally weak for this evaluation, and under these conditions the energies to failure are less than 10% lower for repetitive than single-pulse UIS. $1200\ \mathbf{V}/40\ \mathbf{m}\ \mathbf{\Omega}$ MOSFET parts were stressed with 100 mJ pulses and the integrity of the gate oxide was assessed with a TDDB test. The times to failure for fresh and stressed parts are effectively the same. Tests on parts from several SiC device suppliers showed that high R-UIS ruggedness is a major differentiator of Microsemi's SiC technology.
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4H-SiC结势垒肖特基二极管和功率mosfet具有高重复美国坚固性
提出了重复非箝位电感开关(R-UIS)的测试程序,并报告了最先进的4H-SiC肖特基势垒二极管(sbd)和mosfet的测试结果。对于额定电压为700、1200和1700 V的SBD部件,失效时的能量分别为8.3、8.9和10.3 J/cm2。在此评估中有意将累积热效应设置为较弱,并且在这些条件下,重复的失效能量比单脉冲UIS低不到10%。$1200\ \mathbf{V}/ $ 40\ \mathbf{m}\ \mathbf{\Omega}$用100 mJ脉冲对MOSFET部件进行应力处理,并通过TDDB测试评估栅极氧化物的完整性。新部件和受压部件失效的时间实际上是相同的。对几家SiC器件供应商的部件进行的测试表明,高r - us坚固性是Microsemi SiC技术的主要区别。
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