Micromirror arrays designed and tested for space instrumentation

F. Zamkotsian, M. Canonica, K. Tangen, P. Lanzoni, E. Grassi, R. Barette, C. Fabron, S. Waldis, W. Noell, N. D. de Rooij, L. Marchand, L. Duvet
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引用次数: 4

Abstract

Next-generation infrared astronomical instrumentation for ground-based and space telescopes requires MOEMS-based programmable slit masks for multi-object spectroscopy. We made a full space evaluation of Texas Instruments DMD chips, including tests at cold temperature and in vacuum, life tests, radiations, and vibrations and shocks. These results do not reveal any show-stopper concerning its ability to meet environmental space requirements. In parallel, a 100×200µm2 micro-mirror array was successfully designed for cryogenic temperature, fabricated and tested at 92K. Large micromirror arrays of 20'000 micromirrors have also been fabricated. These tests demonstrate the full ability of this type of components for space instrumentation.
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为空间仪器设计和测试微镜阵列
用于地面和空间望远镜的下一代红外天文仪器需要基于moems的可编程狭缝掩模用于多目标光谱。我们对德州仪器DMD芯片进行了全面的空间评估,包括低温和真空测试、寿命测试、辐射测试、振动和冲击测试。这些结果并没有显示出其满足环境空间要求的能力有任何问题。同时,我们成功地设计了一个100×200µm2的低温微镜阵列,并在92K下进行了制作和测试。由2万个微镜组成的大型微镜阵列也已被制造出来。这些试验证明了这类组件用于空间仪器的全部能力。
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