{"title":"Nanopillar Formation via Defect Activation and Coulomb Explosion Initiated by a 355 nm Nd:YAG Laser Beam","authors":"Yujie Han, Y. Furukawa","doi":"10.1109/ICMENS.2004.110","DOIUrl":null,"url":null,"abstract":"The interaction of nanosecond laser pulses in the ultraviolet wavelength range with the semiconductor SiC was investigated. Under low energy fluence, an array of highly orientated nanoparticles on the surface of SiC was formed via defect activation and coulomb explosion using 355 nm UV laser irradiation. Under high energy fluence, surface modification and ablation could occur.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"20 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMENS.2004.110","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The interaction of nanosecond laser pulses in the ultraviolet wavelength range with the semiconductor SiC was investigated. Under low energy fluence, an array of highly orientated nanoparticles on the surface of SiC was formed via defect activation and coulomb explosion using 355 nm UV laser irradiation. Under high energy fluence, surface modification and ablation could occur.
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