Micromachined Thin-Film Actuated Mirror Array For High-Brightness Projection Displays

Abstract

As shown in voltages are the actuators. Ir of the individual corresponding When there is n3 are fully tilted, according to ths between the Fig. 1, a TFAMA module consists of the active matrix, where the image signal applied, the cantilever-type piezoelectric actuators, and the reflection mirrors, on top of order to use the TFAMA module as a display device, the variation of the tilting angle mirror pixel need to be expressed as the change in light intensity of the point on the projected screen. Figure 2 shows the light modulation principle of TFAMA. tilting of mirror pixels, no light goes out through the light stop. When the mirror pixels .‘ut1 light goes out to the screen. By controlling the tilting angle of the mirror pixel signal voltage applied to the corresponding actuator, 256 steps of gray levels in brightest and the darkest can be generated on the screen.