Increased reliability of a-Si TFT's deposited on clear plastic substrates at high temperatures

K. Long, A. Kattamis, I. Cheng, H. Gleskova, S. Wagner, J. Sturm
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引用次数: 2

Abstract

In this paper, the authors have developed an a-Si TFT process on clear plastic substrates which allows direct transfer of industry a-Si TFT process on glass to plastic substrate for flexible electronics applications. The high temperature process increases the reliability of the a-Si TFT's, which is critical for OLED's where one TFT must operate in a DC condition
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提高了透明塑料衬底上沉积的a-Si TFT在高温下的可靠性
在本文中,作者开发了透明塑料基板上的a-Si TFT工艺,该工艺允许将玻璃上的工业a-Si TFT工艺直接转移到塑料基板上,用于柔性电子应用。高温工艺提高了a- si TFT的可靠性,这对于必须在直流条件下工作的OLED至关重要
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