Transient Thermal Simulation of 3-D ICs with Integrated Microchannel Cooling Using Laguerre Polynomials

Abstract

In this paper, an unconditionally stable method for transient thermal simulation of 3-D ICs with integrated microchannel cooling is proposed. The method is based on marching-on-in-order scheme, and the calculation time does not increase as the number of time steps increases. Moreover, a data filtering method is applied to reduce the number of basis functions required, thereby further improving the computational efficiency. Numerical examples are presented to verify the accuracy and efficiency of the proposed method.