{"title":"Methods to Enable Fault Isolation on 2.5D Molded Interposer Packages","authors":"D. Hunt, Dan Bader, P. Limbecker, Heiko Barth","doi":"10.31399/asm.edfa.2021-4.p014","DOIUrl":null,"url":null,"abstract":"\n This article discusses the failure analysis challenges associated with large overmolded 2.5D packages and explains how laser decapsulation followed by microwave-induced plasma (MIP) spot etching removes overmold while keeping everything else intact. It also describes a defect isolation procedure in which the sample is analyzed in a large chamber environmental SEM with its ball grid array directly wired to an EBAC amplifier.","PeriodicalId":431761,"journal":{"name":"EDFA Technical Articles","volume":"6 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"EDFA Technical Articles","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.31399/asm.edfa.2021-4.p014","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This article discusses the failure analysis challenges associated with large overmolded 2.5D packages and explains how laser decapsulation followed by microwave-induced plasma (MIP) spot etching removes overmold while keeping everything else intact. It also describes a defect isolation procedure in which the sample is analyzed in a large chamber environmental SEM with its ball grid array directly wired to an EBAC amplifier.