Ryan T. Beazer, Jared E. Payne, G. Nielson, Rebecca Anderson, M. Thompson, Topher Johnson, Brad Ferguson, S. Schultz
{"title":"Development of a Transparent Cryogenic Probe Card Based on Silicon Carbide","authors":"Ryan T. Beazer, Jared E. Payne, G. Nielson, Rebecca Anderson, M. Thompson, Topher Johnson, Brad Ferguson, S. Schultz","doi":"10.1109/ietc54973.2022.9796877","DOIUrl":null,"url":null,"abstract":"This work provides an overview of a silicon carbide-based cryogenic probe card, a device for small-circuit verification and assessment. Both a compact orthoplanar and a fixed-fixed beam design are discussed. The accompanying printed circuit board device is examined. Simulation results verify the feasibility of the presented designs.","PeriodicalId":251518,"journal":{"name":"2022 Intermountain Engineering, Technology and Computing (IETC)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 Intermountain Engineering, Technology and Computing (IETC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ietc54973.2022.9796877","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This work provides an overview of a silicon carbide-based cryogenic probe card, a device for small-circuit verification and assessment. Both a compact orthoplanar and a fixed-fixed beam design are discussed. The accompanying printed circuit board device is examined. Simulation results verify the feasibility of the presented designs.
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