Fabrication of LED based Ultra Slim Optical Pointing Device

Jae-Young Joo, Do-Kyun Woo, S. Park, Sun-Kyu Lee
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引用次数: 1

Abstract

The Ultra Slim Optical Pointing Device (USOPD) is a slim optical mouse as an input device for the application of wireless portable personnel communication device like a smart phone. In this paper, we have fabricated optical components of GaN LED based USOPD. The USOPD consist of illumination optical components and imaging lens. LED beam shaping lens consisting of both aspheric lens and Fresnel facet successfully machined by Diamond Turning Machine (DTM). Additional V-shaped groove with refractive-reflective surfaces (VGRRS) for beam path banding was fabricated by bulk micromachining of silicon and the shadow effect in thermal evaporation. Fabrications of imaging lens, arrayed multilevel Fresnel lenses, were fabricated on electron beam lithography, FAB etching. The proposed optical components are extreme compactness as well as high optical efficiency, thereby applicable to the ultra slim optical system like USOPD.
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基于LED的超薄光学指向器件的制造
超薄光学指向设备(USOPD)是一种超薄光学鼠标,作为智能手机等无线便携式人员通信设备的输入设备。在本文中,我们制作了基于USOPD的GaN LED光学元件。USOPD由照明光学元件和成像透镜组成。利用金刚石车床成功地加工出非球面透镜和菲涅耳面组成的LED光束整形透镜。利用硅的体微加工和热蒸发中的阴影效应,制备了具有折射反射表面的附加v形槽(VGRRS)。采用电子束光刻、FAB蚀刻技术制备了阵列多层菲涅耳透镜。所提出的光学元件结构紧凑,光学效率高,适用于USOPD等超薄光学系统。
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