C-band 10 Watt MMIC amplifier manufactured using refractory SAG process

I. Bahl, R. Wang, A. Geissberger, E. Griffin, C. Andricos
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引用次数: 6

Abstract

The design and performance of a C-band single-chip GaAs monolithic microwave integrated circuit (MMIC) amplifier manufactured using a fully planar, refractory, self-aligned gate (SAG) technology is described. The design uses a 4-mm gate periphery FET with a unit finger width of 250 mu m as a standard cell. The power MMIC design is based on measured data for the FET, which has three source vias for low parasitic source grounding. The FET was optimized for maximum power and efficiency at C-band and has 16 fingers. The design uses an innovative method to determine accurate linear models for the power FET used to design the matching network and for simulating accurately the performance of the power amplifier. The amplifier demonstrates 10 W power output at 5.5 GHz with associated gain of 5 dB and power-added efficiency of 36%. The functional yield of the IC on the best wafer was 70%.<>
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采用耐火SAG工艺制造的c波段10瓦MMIC放大器
介绍了一种采用全平面、难熔自对准栅极(SAG)技术制造的c波段单片砷化镓单片微波集成电路(MMIC)放大器的设计和性能。本设计采用4mm栅极外围场效应管,单位指宽为250 μ m作为标准单元。功率MMIC设计基于FET的测量数据,FET具有三个源过孔,用于低寄生源接地。该FET在c波段进行了最大功率和效率优化,具有16个指。该设计采用了一种创新的方法来确定用于设计匹配网络和精确模拟功率放大器性能的功率场效应管的精确线性模型。该放大器在5.5 GHz下输出10w功率,相关增益为5db,功率增加效率为36%。最佳晶圆上集成电路的功能收率为70%。
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