In-situ cure shrinkage measurement of die attach and underfill materials

M. van Soestbergen, J. L. M. Llacer Martinez, J. Zaal, A. Mavinkurve
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Abstract

We present a robust method for measuring the cure shrinkage of dispensable organic films in-situ. Samples consist of dispensed organic material (e.g. die attach or underfill) sandwiched between a glass substrate and a silicon die. A Thermal Mechanical Analyzer (TMA) was used to accurately measure the displacement of the die during cure, and to control the temperature. An analytical model has been derived to disentangle the thermal shrinkage, and chemical cure shrinkage, which is verified by surface profile measurements (projection Moiré). We show that the measured displacement can be directly related to the cure shrinkage. To verify this methodology we have characterized a commercially available die attach material. The characterization yields a simultaneous measurement of the magnitude of cure shrinkage and the cure kinetics.
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模具附着物和底料的原位固化收缩测量
我们提出了一种可靠的方法来测量可有可无的有机薄膜的固化收缩率。样品由夹在玻璃基板和硅模之间的分配有机材料(例如,贴片或下填料)组成。利用热机械分析仪(TMA)精确测量了模具在固化过程中的位移,并对温度进行了控制。导出了一个解析模型来解算热收缩和化学固化收缩,并通过表面轮廓测量(投影莫尔图)进行了验证。结果表明,实测位移与固化收缩率有直接关系。为了验证这种方法,我们对一种市售的模具附加材料进行了表征。表征产生了固化收缩幅度和固化动力学的同时测量。
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