P. Shanin, N. Koval, A. V. Kozirev, I. Goncharenko, J. Langner, S. Grigoriev
{"title":"Plasma filtration of vacuum arc droplets","authors":"P. Shanin, N. Koval, A. V. Kozirev, I. Goncharenko, J. Langner, S. Grigoriev","doi":"10.1109/DEIV.2000.879058","DOIUrl":null,"url":null,"abstract":"Theoretical and experimental studies have been performed on the effect of the gas-discharge plasma on the vacuum arc droplet fraction arriving at the sample in plasma-assisted deposition of TiN coatings. It has been shown that the number of droplets on a negatively biased sample decreases four or five times if the droplet flow passes through the plasma of a low-pressure nonself-sustained arc discharge having a higher electron temperature than the plasma of the vacuum arc. Possible mechanisms for the observed plasma filtration of the droplet fraction of a vacuum arc are discussed.","PeriodicalId":429452,"journal":{"name":"Proceedings ISDEIV. 19th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. No.00CH37041)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-09-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings ISDEIV. 19th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. No.00CH37041)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DEIV.2000.879058","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
Theoretical and experimental studies have been performed on the effect of the gas-discharge plasma on the vacuum arc droplet fraction arriving at the sample in plasma-assisted deposition of TiN coatings. It has been shown that the number of droplets on a negatively biased sample decreases four or five times if the droplet flow passes through the plasma of a low-pressure nonself-sustained arc discharge having a higher electron temperature than the plasma of the vacuum arc. Possible mechanisms for the observed plasma filtration of the droplet fraction of a vacuum arc are discussed.
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