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Proceedings ISDEIV. 19th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. No.00CH37041)最新文献

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Surface conditions and electrical breakdown characteristics of ozonized water treated copper electrodes of a vacuum gap 臭氧水处理真空间隙铜电极的表面条件和电击穿特性
S. Kobayashi, K. Sekikawa, K. Asano, Y. Saito
Ozonized water treatment has the advantages that organic contaminants can be removed to produce a passivated oxidized film on the surface and the treated surface condition can be kept in air. This technique has been applied to the surface treatment of oxygen-free copper electrodes. Experimental results revealed that the breakdown field at the 1st application of voltage was not always improved, but a significant conditioning effect was obtained without any in-situ precautions. Moreover, additional in-situ sputter cleaning on the ozonized water treated surface improved the 1st breakdown field. Surface analysis clarified that after the ozonized water treatment, the electrode surface was covered with an oxidized film (CuO) and this film was removed to expose bulk copper after conditioning by 500 repetitive breakdowns caused by applying impulse voltages. These results can be attributed to the characteristic that the treated surface can be kept in air.
臭氧水处理的优点是可以去除有机污染物,在表面形成钝化氧化膜,并且处理后的表面状态可以保持在空气中。该技术已应用于无氧铜电极的表面处理。实验结果表明,首次施加电压时击穿场并不总是得到改善,但在不采取任何现场预防措施的情况下,获得了显著的调节效果。此外,在臭氧水处理表面进行额外的原位溅射清洗改善了第一次击穿场。表面分析表明,在臭氧水处理后,电极表面覆盖了一层氧化膜(CuO),并在施加脉冲电压500次重复击穿后去除该膜以暴露大量铜。这些结果可归因于处理后的表面可以保持在空气中的特性。
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引用次数: 1
Surface modification by cathode spots of a vacuum arc 真空电弧阴极斑点表面改性
K. Takeda, M. Sugimoto
Cathode spots of a vacuum arc have the smart property to selectively remove oxide on a metal surface. Analyses of a surface treated by a vacuum arc revealed that various interesting surface modifications occurred during the removal of the oxide. The authors have investigated these effects to open up new applications of the vacuum arc. The cathode spots can remove inclusions which often cause surface defects. They attack not only oxide but also carbide inclusions and eliminate them from the surface by evaporation. Dry cleaning to remove the organic compound can also be possible. Degreasing (removal of grease) proceeds in parallel to the removal of oxide. The vacuum arc treatment results in the increase of hardness in the surface layer due to the rapid heating and quenching.
真空电弧阴极点具有选择性去除金属表面氧化物的智能特性。对真空电弧处理表面的分析表明,在去除氧化物的过程中,表面发生了各种有趣的变化。作者对这些影响进行了研究,以开辟真空电弧的新应用领域。阴极斑点可以去除经常引起表面缺陷的夹杂物。它们不仅能腐蚀氧化物,还能腐蚀碳化物夹杂物,并通过蒸发将其从表面清除。干洗也可以去除有机化合物。脱脂(去除油脂)与去除氧化物同时进行。真空电弧处理由于加热和淬火速度快,使表层硬度提高。
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引用次数: 17
On the role of nonmetal inclusions at the cathode surface in the initiation and self-sustaining of a vacuum discharge 阴极表面非金属夹杂物在真空放电的产生和自我维持中的作用
S. Barengolts, Yu.A. Barengolts
Emission processes are treated for the case where dielectric and semiconductor microinclusions are present on the surface of a metal cathode. It has been shown that the emission current-voltage characteristic plotted in the Fowler-Nordheim coordinates is close to a straight line corresponding to a high field enhancement factor. A stationary problem on the heating of a nonmetal microprotrusion by the field emission current has been solved. Calculations have shown that for explosive emission processes to be initiated in this case, lower critical currents and lower Joule energy spatial densities are required then in the case of metal microprotrusions on a cathode. This is the reason why the initiation of a vacuum discharge and its operation at the early stage occur at those sites where nonmetal inclusions are present. For a vacuum arc discharge, the required electric field strength is achieved through the charging of the surface of a nonmetal inclusion by the ion current from the arc plasma.
针对存在于金属阴极表面上的介电和半导体微内含物的情况,对发射过程进行处理。结果表明,在Fowler-Nordheim坐标系中绘制的发射电流-电压特性接近于一条直线,对应于高场增强因子。解决了场发射电流加热非金属微突起的稳态问题。计算表明,要在这种情况下启动爆炸发射过程,则需要较低的临界电流和较低的焦耳能量空间密度,然后在阴极上的金属微突起的情况下。这就是为什么真空放电的开始和早期操作发生在非金属夹杂物存在的地方的原因。对于真空电弧放电,所需的电场强度是通过电弧等离子体的离子流对非金属夹杂物表面的充电来实现的。
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引用次数: 0
Generation mechanism in triode with virtual cathode 虚阴极三极管的生成机理
V. P. Grigoryev, T. Koval
The triode with virtual cathode (VC) generates gigawatt pulses in wide frequency band. Basically, existing theoretical investigations of this system were carried out by method of numerical simulations and did not explain many experimental facts. The analytical description is more successful for investigation of generation mechanism. Two theoretical models describing the generation mechanism of the electromagnetic oscillation radiation in the virtual cathode triode are presented in this paper.
虚拟阴极三极管(VC)在宽频带产生千兆瓦脉冲。现有的理论研究基本上是通过数值模拟的方法进行的,并不能解释许多实验事实。分析描述对于研究生成机理是比较成功的。本文提出了虚拟阴极三极管中电磁振荡辐射产生机理的两个理论模型。
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引用次数: 0
Some characteristics of non-self-maintained discharge in metal vapor 金属蒸汽中非自持放电的一些特性
M. Nikitin, V. Egorov
The method of metal evaporation in a vacuum by a nonself-maintained discharge is applied as for deposition of thin films and coatings, and as for diffusion saturation of metallic materials. Change of the thermoionic cathode temperature and discharge power provides the evaporator work in wide interval of currents (1-100 A) and voltages (30-700 V), initiating the fluxes of deposited atoms with ionization degree from 2 to about 100%. The dependence of initiation conditions and discharge burning were considered due to vacuum, the evaporated metals, the cathode/anode distance and the cathode temperature in voltage range from 50 to 500 V with currents to 5 A. The conditions of discharge initiation are improved with decreasing basic pressure in chamber lower than 0.01 Pa. The increasing of pressure lead to burning of the shunting glow discharge through residual gases. The optimal cathode temperatures are in range from 1800 to 2200/spl deg/C. The plasma parameters were determined from I-V characteristics of a Langmuir probe. The temperature and density of the plasma electrons are changed in intervals, respectively, (8-12) /spl times/10/sup 4/ K and (0.4-5)/spl times/10/sup 1 /cm/sup -3/. The density of ion current was 5 mA cm/sup -2/. Maximum values of ionization degree for evaporated Cu, Cr and Al atoms are attained at 100,200 and 250 V, respectively, and are of the range 30-50%.
通过非自持放电在真空中蒸发金属的方法适用于薄膜和涂层的沉积,以及金属材料的扩散饱和。热离子阴极温度和放电功率的变化使蒸发器在电流(1-100 A)和电压(30-700 V)的宽间隔内工作,激发电离度从2到100%左右的沉积原子的通量。在电压50 ~ 500v,电流5 A范围内,考虑了真空、金属蒸发量、阴极/阳极距离和阴极温度对点火条件和放电燃烧的影响。放电起爆条件随着腔内基本压力低于0.01 Pa的减小而改善。压力的增加导致分流辉光放电通过残余气体燃烧。最佳阴极温度范围为1800 ~ 2200/spl℃。等离子体参数由Langmuir探针的I-V特性确定。等离子体电子的温度和密度分别以(8-12)/spl次/10/sup 4/ K和(0.4-5)/spl次/10/sup 1 /cm/sup -3/为间隔变化。离子电流密度为5 mA cm/sup -2/。蒸发Cu、Cr和Al原子的最大电离度分别在100,200和250 V时达到,在30-50%之间。
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引用次数: 0
High-current vacuum arc evolution in a six-gap rod electrode system 六间隙棒电极系统的大电流真空电弧演化
D. Alferov, V. Sidorov
Results of researches of pulse high-current vacuum arc evolution in a six-gap rod electrode system in the peak current range 10-100 kA are represented. The researches were carried out on a demountable vacuum tube with simultaneous registration of electrical parameters of discharge, discharge plasma glow and luminous spots on electrodes. Fast discharge transition from a trigger unit into inter-rod gaps at reaching current to 5-9 kA was revealed. Correlation between a moment of step-like voltage fall and a moment of formation of new discharge channel in the inter-rod gaps was shown. Various modes of vacuum arc in an inter-rod gaps and multiplication of discharge channels on all inter-rod gaps with growth of a current were observed. An effect of rise of current rate on process of a vacuum arc evolution was investigated.
介绍了在峰值电流10 ~ 100 kA范围内,六间隙棒电极系统脉冲大电流真空电弧演化的研究结果。在可拆卸真空管上进行了放电、放电等离子体辉光和电极上光斑的电学参数同步登记。在电流达到5- 9ka时,揭示了从触发单元到棒间间隙的快速放电过渡。给出了阶跃式电压下降力矩与新放电通道形成力矩之间的关系。观察到真空电弧在棒间隙中的各种模式,以及随着电流的增加,所有棒间隙上的放电通道倍增。研究了电流速率的升高对真空电弧形成过程的影响。
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引用次数: 7
Surface structure formation by means of plasma oscillations. Numerical simulation and the principal regularities 利用等离子体振荡形成表面结构。数值模拟及主要规律
I. Levchenko
Numerical simulation of a new method proposed previously for plasma deposition allowing creation of the unique surface structures was carried out. The primary mechanisms were studied and the surface structures were calculated. The present paper describes: model of numerical simulation and conditions of digitization, the set of surface structures calculated, boundary conditions, numerical studying of an electrical field distribution in the oscillation area, numerically calculated ion traces and distribution of ion precipitation to the substrate under plasma oscillation area. The investigation proposed contains the recommendations with respect to experimental investigations being planned, and possible advantages of a new technique for complex surface structure formation with no mask used.
对先前提出的一种新的等离子体沉积方法进行了数值模拟,这种方法可以产生独特的表面结构。研究了主要机理,计算了表面结构。本文叙述了数值模拟模型和数字化条件,计算的表面结构集,边界条件,振荡区电场分布的数值研究,等离子体振荡区离子迹线的数值计算和离子沉降到基片的分布。提出的调查包含有关正在计划的实验调查的建议,以及不使用掩膜的复杂表面结构形成新技术的可能优势。
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引用次数: 0
On regime for increasing the breakdown strength of vacuum gap between the microchannel plate and screen of the image amplifier 提高图像放大器微通道板与屏间真空间隙击穿强度的方案
A. Emelyanov, L.A. Prokhodova
The experimental data on the conditioning of the film electrodes of the accelerating gap of a microchannel image amplifier with a series of high-voltage nanosecond pulses are presented. The possibility of the exclusion of a visual control for changes in the local glows of the screen during conditioning and this process unification is shown.
本文给出了一系列高压纳秒脉冲对微通道图像放大器加速间隙膜电极调节的实验数据。排除视觉控制在调节过程中屏幕局部发光变化的可能性和这一过程的统一显示。
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引用次数: 0
Installation for vacuum-arc film deposition by filtered plasma fluxes 过滤等离子体通量的真空弧膜沉积装置
V. Khoroshikh, S. A. Leonov, V. A. Belous
An installation for vacuum-arc droplet-free film deposition was designed. It contains two rectilinear plasma sources, in whose cylindrical anodes the disk filtering shields are placed. The investigated variant of installation provides ion current at a level 2.4 A at a current of the arc in each of plasma sources 100 A. The deposition rate of 5 /spl mu/m/h for titanium nitride films was achieved over the rotating cylindrical detail of height 50 mm and diameter of 45 mm. It is shown also that the installation allows to receive coatings by thickness up to 3 microns at the average size of microroughnesses on its surface about 0.08-0.09 microns.
设计了一种真空电弧无液滴薄膜沉积装置。它包含两个直线等离子体源,在其圆柱形阳极上放置了圆盘滤波屏蔽。所研究的装置变体在每个等离子体源的电弧电流为100 a时提供2.4 a水平的离子电流。在高度为50 mm、直径为45 mm的旋转圆柱细部上,氮化钛薄膜的沉积速率可达5 /spl mu/m/h。结果还表明,该装置允许接收厚度达3微米的涂层,其表面的平均微粗糙度约为0.08-0.09微米。
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引用次数: 0
Arc discharges with gas-impregnated cathodes in vacuum 真空中气体浸渍阴极的电弧放电
S. Shkol’nik
The paper reflects the condition of research into the vacuum arc with such an impregnation of a cathode with hydrogen that the average share of each atom of metal is roughly one H atom. The introductory sections discuss in brief the basic characteristics of the Me-H system and techniques of impregnation of different metals with H. The subsequent sections present the results of investigations of cathode spot parameters and arc characteristics at various Ti cathode impregnation degree. A comparison with characteristics of degassed cathodes demonstrated marked differences: at impregnation of a cathode with H, the velocity of cathode spot motion grows, the current per spot falls off, erosion diminishes; the high-current arc burns steadily and at a lower voltage; the current, critical for anode spot formation, grows significantly. The results given show that the use of H-impregnated cathodes can prove promising for various applications.
本文反映了用氢浸渍阴极的真空电弧的研究情况,即每个金属原子的平均份额约为一个H原子。引言部分简要介绍了Me-H体系的基本特征和h浸渍不同金属的技术,随后的部分介绍了不同Ti浸渍程度下阴极光斑参数和电弧特性的研究结果。与脱气阴极的特性比较表明,在H浸渍阴极时,阴极光斑运动速度增大,每个光斑电流减小,侵蚀减小;大电流电弧在较低电压下稳定燃烧;对阳极斑点形成至关重要的电流显著增长。结果表明,h -浸渍阴极具有广泛的应用前景。
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引用次数: 15
期刊
Proceedings ISDEIV. 19th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. No.00CH37041)
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