S. Picozz, L. Lozz, S. Santucci, C. Cantalini, C. Baratto, G. Sberveglieri, I. Armentano, J. Kenny, L. Valenti, B. Delley
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引用次数: 4
Abstract
Carbon nanotubes (CNTs) thin films have been investigated as new O/sub 3/ gas sensors in the concentration range 75 - 200 ppb. 150 nm thick CNTs thin films, have been prepared by rf-PECVD on Si/Si/sub 3/N/sub 4/ substrates, provided with Pt interdigital electrodes, and post-annealed under controlled conditions. The electrical response to O/sub 3/ has been investigated at different operating temperatures starting from the room temperature. Sensitivity response analysis has demonstrated that CNTs are responsive to O/sub 3/ with a decrease of the baseline resistance similar to that observed for NO/sub 3/. In order to obtain a theoretical validation of the experimental results, the equilibrium position, charge transfer and density of states have been calculated from first principles for the CNT+O/sub 3/ system.
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