{"title":"Rapid µm ITO Electrode Patterning by Laser-direct Writing Using a Modest Commercial Fibre Laser Scriber","authors":"","doi":"10.2961/jlmn.2023.02.2002","DOIUrl":null,"url":null,"abstract":"This work presented a rapid method for determining indium tin oxide (ITO) ablation threshold. The method relies on the conduction property of the ITO film and measured the resistance changes of an ITO test strip after the laser ablation. The method can rapidly measure the lowest laser fluence that produced the resistance increase of the test strip. The method is simpler compared to the typical method that requires the microscopic measurement of laser ablated spot sizes. We determined the ITO laser ablation parameters for three types of ITO slides and prepared ITO conducting electrodes with width smaller than 10 µ m. The result demonstrated the effectiveness and flexibility of a modest and inexpensive NIR laser scriber for ITO microelectrode writing.","PeriodicalId":54788,"journal":{"name":"Journal of Laser Micro Nanoengineering","volume":"311 1","pages":"0"},"PeriodicalIF":0.8000,"publicationDate":"2023-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Laser Micro Nanoengineering","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.2961/jlmn.2023.02.2002","RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0
Abstract
This work presented a rapid method for determining indium tin oxide (ITO) ablation threshold. The method relies on the conduction property of the ITO film and measured the resistance changes of an ITO test strip after the laser ablation. The method can rapidly measure the lowest laser fluence that produced the resistance increase of the test strip. The method is simpler compared to the typical method that requires the microscopic measurement of laser ablated spot sizes. We determined the ITO laser ablation parameters for three types of ITO slides and prepared ITO conducting electrodes with width smaller than 10 µ m. The result demonstrated the effectiveness and flexibility of a modest and inexpensive NIR laser scriber for ITO microelectrode writing.
期刊介绍：
Journal of Laser Micro/Nanoengineering, founded in 2005 by Japan Laser Processing Society (JLPS), is an international online journal for the rapid publication of experimental and theoretical investigations in laser-based technology for micro- and nano-engineering. Access to the full article is provided free of charge.
JLMN publishes regular articles, technical communications, and invited papers about new results related to laser-based technology for micro and nano engineering. The articles oriented to dominantly technical or industrial developments containing interesting and useful information may be considered as technical communications.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
