Pub Date : 2023-09-01DOI: 10.2961/jlmn.2023.02.2002
This work presented a rapid method for determining indium tin oxide (ITO) ablation threshold. The method relies on the conduction property of the ITO film and measured the resistance changes of an ITO test strip after the laser ablation. The method can rapidly measure the lowest laser fluence that produced the resistance increase of the test strip. The method is simpler compared to the typical method that requires the microscopic measurement of laser ablated spot sizes. We determined the ITO laser ablation parameters for three types of ITO slides and prepared ITO conducting electrodes with width smaller than 10 µ m. The result demonstrated the effectiveness and flexibility of a modest and inexpensive NIR laser scriber for ITO microelectrode writing.
{"title":"Rapid µm ITO Electrode Patterning by Laser-direct Writing Using a Modest Commercial Fibre Laser Scriber","authors":"","doi":"10.2961/jlmn.2023.02.2002","DOIUrl":"https://doi.org/10.2961/jlmn.2023.02.2002","url":null,"abstract":"This work presented a rapid method for determining indium tin oxide (ITO) ablation threshold. The method relies on the conduction property of the ITO film and measured the resistance changes of an ITO test strip after the laser ablation. The method can rapidly measure the lowest laser fluence that produced the resistance increase of the test strip. The method is simpler compared to the typical method that requires the microscopic measurement of laser ablated spot sizes. We determined the ITO laser ablation parameters for three types of ITO slides and prepared ITO conducting electrodes with width smaller than 10 µ m. The result demonstrated the effectiveness and flexibility of a modest and inexpensive NIR laser scriber for ITO microelectrode writing.","PeriodicalId":54788,"journal":{"name":"Journal of Laser Micro Nanoengineering","volume":"311 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135349012","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-09-01DOI: 10.2961/jlmn.2023.02.2010
We simulate laser ablation of silicon with GHz bursts of femtosecond laser pulses using COMSOL Multiphysics. The simple model of deformation geometry is considered to simulate laser ablation and material removal, giving a laser-induced crater after irradiation. We demonstrate that at the same burst pulse energy a deeper crater is ablated for a GHz burst for larger number of intra-pulses. Analysis of the temperature evolution of silicon target reveals that during femtosecond laser irradiation with GHz burst mode, efficient absorption of laser energy occurs due to the heat-accumulation effect. These simulated results show a good agreement with the experimental measurements and could quantitatively explain the mechanism of silicon ablation enhancement with the GHz bursts of femtosecond laser pulses.
{"title":"Numerical Simulation of Silicon Laser Ablation with GHz Bursts of Femtosecond Pulses","authors":"","doi":"10.2961/jlmn.2023.02.2010","DOIUrl":"https://doi.org/10.2961/jlmn.2023.02.2010","url":null,"abstract":"We simulate laser ablation of silicon with GHz bursts of femtosecond laser pulses using COMSOL Multiphysics. The simple model of deformation geometry is considered to simulate laser ablation and material removal, giving a laser-induced crater after irradiation. We demonstrate that at the same burst pulse energy a deeper crater is ablated for a GHz burst for larger number of intra-pulses. Analysis of the temperature evolution of silicon target reveals that during femtosecond laser irradiation with GHz burst mode, efficient absorption of laser energy occurs due to the heat-accumulation effect. These simulated results show a good agreement with the experimental measurements and could quantitatively explain the mechanism of silicon ablation enhancement with the GHz bursts of femtosecond laser pulses.","PeriodicalId":54788,"journal":{"name":"Journal of Laser Micro Nanoengineering","volume":"2011 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135388728","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-09-01DOI: 10.2961/jlmn.2023.02.2004
In this study, nanoparticles of manganese phthalocyanine (MnPc) were synthesized through laser ablation in liquid. The MnPc powder was dispersed in deionized water using sonification, and the resulting suspension was irradiated with a Nd:YAG laser. The synthesized nanoparticles were characterized using various techniques including Scanning Electron Microscope (SEM), Dynamic Light Scattering (DLS), Ultraviolet-visible spectroscopy (UV-Vis), and zeta potential analysis. The SEM analysis revealed that the morphology of the nanoparticles was predominantly spherical particles. The DLS measurements showed that the secondary particle sizes decreased as the laser fluence increased. The UV-Vis spectroscopy results indicated an increase in absorbance at low laser fluence, followed by a decrease at high laser fluence. Additionally, the zeta potential analysis confirmed the dispersion stability of the nanoparticles. The photoacoustic signal generated by the nanoparticles exhibited an increase at low laser fluence and a decrease at high laser fluence. These results demonstrate the successful synthesis of MnPc nanoparticles using laser ablation in liquid. The obtained nanoparticles exhibited desirable morphological characteristics and showed potential for enhancing photoacoustic signals.
{"title":"Preparation of Manganese Phthalocyanine Nanoparticles by Laser Ablation in Liquid and Application to Bioimaging","authors":"","doi":"10.2961/jlmn.2023.02.2004","DOIUrl":"https://doi.org/10.2961/jlmn.2023.02.2004","url":null,"abstract":"In this study, nanoparticles of manganese phthalocyanine (MnPc) were synthesized through laser ablation in liquid. The MnPc powder was dispersed in deionized water using sonification, and the resulting suspension was irradiated with a Nd:YAG laser. The synthesized nanoparticles were characterized using various techniques including Scanning Electron Microscope (SEM), Dynamic Light Scattering (DLS), Ultraviolet-visible spectroscopy (UV-Vis), and zeta potential analysis. The SEM analysis revealed that the morphology of the nanoparticles was predominantly spherical particles. The DLS measurements showed that the secondary particle sizes decreased as the laser fluence increased. The UV-Vis spectroscopy results indicated an increase in absorbance at low laser fluence, followed by a decrease at high laser fluence. Additionally, the zeta potential analysis confirmed the dispersion stability of the nanoparticles. The photoacoustic signal generated by the nanoparticles exhibited an increase at low laser fluence and a decrease at high laser fluence. These results demonstrate the successful synthesis of MnPc nanoparticles using laser ablation in liquid. The obtained nanoparticles exhibited desirable morphological characteristics and showed potential for enhancing photoacoustic signals.","PeriodicalId":54788,"journal":{"name":"Journal of Laser Micro Nanoengineering","volume":"368 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135348977","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-09-01DOI: 10.2961/jlmn.2023.02.2006
Hierarchical nano/microscale surfaces offer properties that are of high interest to industry, as they can enable value-added functionalities such as controlled frictional, optical, aerodynamic, hydrodynamic, and other phenomena. Advanced laser-based structuring/texturing technologies, such as direct laser writing, laser-induced periodic structuring, and direct laser interference patterning, are most prominent for high-speed, large-area, and cost-effective fabrications of micro/nano grooves, riblets, dimples, pillars, pyramids, and their geometric combinations. The focus of this study is to explore how surface topography components are responsible for producing hydrophobic, superhydrophobic, and ultrasuperhydrophobic (contact angles 160°…175°) surfaces by single-step picosec-ond laser micromachining. Four functional surfaces, including microstructured square pyramids with side lengths of 10, 20, 30, 40 µm and nanotextured riblets with feature sizes of <1 µm, were machined on H13 tool steel, and the relationship between topographic characteristics and hydrophobic performance were studied. The results demonstrate that all features are synergistically responsible for the hydrophobic performance within a range of contact angles between 140° and 175°. The most critical role in obtaining superhydrophobic and ultrasuperhydrophobic performance was played by laser-induced nanoriblets on top of periodical microstructures. When nanoriblets were removed by flattening the top surfaces, wettability performance dropped from 175° to 139° contact angles. These results lay a scientific and engineering basis for hierarchical surface formation by laser processing and identify statistical metrics affecting surface wettability for the future development of fully controlled and optimized hydrophobic–hydrophilic surfaces.
{"title":"Parametric Study of Ultrasuperhydrophobic Nanotextured Microstructured Surface Topographies Produced by Picosecond Laser Micromachining on H13 Tool Steel","authors":"","doi":"10.2961/jlmn.2023.02.2006","DOIUrl":"https://doi.org/10.2961/jlmn.2023.02.2006","url":null,"abstract":"Hierarchical nano/microscale surfaces offer properties that are of high interest to industry, as they can enable value-added functionalities such as controlled frictional, optical, aerodynamic, hydrodynamic, and other phenomena. Advanced laser-based structuring/texturing technologies, such as direct laser writing, laser-induced periodic structuring, and direct laser interference patterning, are most prominent for high-speed, large-area, and cost-effective fabrications of micro/nano grooves, riblets, dimples, pillars, pyramids, and their geometric combinations. The focus of this study is to explore how surface topography components are responsible for producing hydrophobic, superhydrophobic, and ultrasuperhydrophobic (contact angles 160°…175°) surfaces by single-step picosec-ond laser micromachining. Four functional surfaces, including microstructured square pyramids with side lengths of 10, 20, 30, 40 µm and nanotextured riblets with feature sizes of <1 µm, were machined on H13 tool steel, and the relationship between topographic characteristics and hydrophobic performance were studied. The results demonstrate that all features are synergistically responsible for the hydrophobic performance within a range of contact angles between 140° and 175°. The most critical role in obtaining superhydrophobic and ultrasuperhydrophobic performance was played by laser-induced nanoriblets on top of periodical microstructures. When nanoriblets were removed by flattening the top surfaces, wettability performance dropped from 175° to 139° contact angles. These results lay a scientific and engineering basis for hierarchical surface formation by laser processing and identify statistical metrics affecting surface wettability for the future development of fully controlled and optimized hydrophobic–hydrophilic surfaces.","PeriodicalId":54788,"journal":{"name":"Journal of Laser Micro Nanoengineering","volume":"94 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135388722","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-09-01DOI: 10.2961/jlmn.2023.02.2003
We demonstrate and compare two approaches for reducing processing time for ultrashort pulse laser surface functionalization with application to femtosecond laser hyperdoping of silicon with a laser pulse duration of 800 fs and an irradiation wavelength of 1030 nm. In the first, we use a Gaussian intensity distribution and increase the repetition rate from 1 kHz to 1002 kHz while keeping all other parameters and thus the accumulated fluence constant. We find that the sub-bandgap absorptance of the material, which we take as target measure, decreases above a repetition rate of 250 kHz. This suggests an inherent limitation of this approach. The second approach is characterized by the use of a line-shaped intensity distribution which is achieved by diffractive beam shaping using a phase-only spatial light modulator. This process proves to be suitable for laser hyperdoping of silicon with a 22-fold enhanced area processing rate while maintaining a sub-bandgap absorp-tance of above 80 % abs .
{"title":"Improving the Processing Efficiency of Femtosecond Laser Sulfur Hyperdoping of Silicon by Diffractive Beam Shaping","authors":"","doi":"10.2961/jlmn.2023.02.2003","DOIUrl":"https://doi.org/10.2961/jlmn.2023.02.2003","url":null,"abstract":"We demonstrate and compare two approaches for reducing processing time for ultrashort pulse laser surface functionalization with application to femtosecond laser hyperdoping of silicon with a laser pulse duration of 800 fs and an irradiation wavelength of 1030 nm. In the first, we use a Gaussian intensity distribution and increase the repetition rate from 1 kHz to 1002 kHz while keeping all other parameters and thus the accumulated fluence constant. We find that the sub-bandgap absorptance of the material, which we take as target measure, decreases above a repetition rate of 250 kHz. This suggests an inherent limitation of this approach. The second approach is characterized by the use of a line-shaped intensity distribution which is achieved by diffractive beam shaping using a phase-only spatial light modulator. This process proves to be suitable for laser hyperdoping of silicon with a 22-fold enhanced area processing rate while maintaining a sub-bandgap absorp-tance of above 80 % abs .","PeriodicalId":54788,"journal":{"name":"Journal of Laser Micro Nanoengineering","volume":"60 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135348978","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-09-01DOI: 10.2961/jlmn.2023.02.2007
,
{"title":"Laser-Induced Forward Transfer of Ni-rich NiTi Alloys for Shape Memory Applications","authors":"","doi":"10.2961/jlmn.2023.02.2007","DOIUrl":"https://doi.org/10.2961/jlmn.2023.02.2007","url":null,"abstract":",","PeriodicalId":54788,"journal":{"name":"Journal of Laser Micro Nanoengineering","volume":"371 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135388725","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-09-01DOI: 10.2961/jlmn.2023.02.2005
High-productivity fabrication of micro-vias in glass substrates is required for post-5G high-frequency signal interposers. This paper describes the fabrication of high-quality micro-vias with a high aspect ratio by ablation using a 248 nm excimer laser. To clarify the details of the ablation process, we investigate the surface microstructure generated by excimer laser irradiation. The results indicate that laser irradiation produces a surface microstructure that enhances the absorption of laser energy.
{"title":"Microstructure Formation on Glass Substrates for High-productivity Fabrication of Micro-vias Using 248 nm Excimer Laser","authors":"","doi":"10.2961/jlmn.2023.02.2005","DOIUrl":"https://doi.org/10.2961/jlmn.2023.02.2005","url":null,"abstract":"High-productivity fabrication of micro-vias in glass substrates is required for post-5G high-frequency signal interposers. This paper describes the fabrication of high-quality micro-vias with a high aspect ratio by ablation using a 248 nm excimer laser. To clarify the details of the ablation process, we investigate the surface microstructure generated by excimer laser irradiation. The results indicate that laser irradiation produces a surface microstructure that enhances the absorption of laser energy.","PeriodicalId":54788,"journal":{"name":"Journal of Laser Micro Nanoengineering","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135388718","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-09-01DOI: 10.2961/jlmn.2023.02.2001
,
{"title":"Laser Cutting of Polymer Templates for Water-Droplet Induced Self-Folding of Cubes: Hinge Geometry Optimization","authors":"","doi":"10.2961/jlmn.2023.02.2001","DOIUrl":"https://doi.org/10.2961/jlmn.2023.02.2001","url":null,"abstract":",","PeriodicalId":54788,"journal":{"name":"Journal of Laser Micro Nanoengineering","volume":"40 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135348976","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-09-01DOI: 10.2961/jlmn.2023.02.2008
We examined the possibility of suppressing elemental segregation of high-entropy alloys (HEAs) using femtosecond laser irradiation. Thin films of iron (Fe), chromium (Cr), and nickel (Ni) were deposited on the surfaces of n-type SiC and p-type GaN substrates. The thicknesses of the Fe, Cr, and Ni films were 12, 7, and 11 nm, respectively. Laser irradiation was performed from the substrate side by focusing on the interface between the Fe film and substrate. Scanning transmission electron microscopy (STEM) bright-field images superimposed on the elemental maps of Fe, Cr, and Ni showed a more homogenous mixing of Fe, Cr, and Ni in the femtosecond-laser-modified region than in the picosecond-laser-modified region. In particular, the Ni distribution showed a significant improvement in homogeneity. In other words, the Ni mixture was more homogeneous in the femtosecond laser-modified region than in the picosecond laser-modified region. Although the duration of the picosec-ond laser pulse was sufficiently long for atomic diffusion, segregation still occurred during the cooling process following laser irradiation.
{"title":"Pulse Duration Dependence of Novel Metal Alloying on Fe/Cr/Ni Thin Films by Ultra-Short Pulsed Laser Irradiation","authors":"","doi":"10.2961/jlmn.2023.02.2008","DOIUrl":"https://doi.org/10.2961/jlmn.2023.02.2008","url":null,"abstract":"We examined the possibility of suppressing elemental segregation of high-entropy alloys (HEAs) using femtosecond laser irradiation. Thin films of iron (Fe), chromium (Cr), and nickel (Ni) were deposited on the surfaces of n-type SiC and p-type GaN substrates. The thicknesses of the Fe, Cr, and Ni films were 12, 7, and 11 nm, respectively. Laser irradiation was performed from the substrate side by focusing on the interface between the Fe film and substrate. Scanning transmission electron microscopy (STEM) bright-field images superimposed on the elemental maps of Fe, Cr, and Ni showed a more homogenous mixing of Fe, Cr, and Ni in the femtosecond-laser-modified region than in the picosecond-laser-modified region. In particular, the Ni distribution showed a significant improvement in homogeneity. In other words, the Ni mixture was more homogeneous in the femtosecond laser-modified region than in the picosecond laser-modified region. Although the duration of the picosec-ond laser pulse was sufficiently long for atomic diffusion, segregation still occurred during the cooling process following laser irradiation.","PeriodicalId":54788,"journal":{"name":"Journal of Laser Micro Nanoengineering","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135388723","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-09-01DOI: 10.2961/jlmn.2023.02.2009
Laser surface texturing of metals is usually performed using pulsed laser sources. Short and ultrashort pulsed laser systems offer the highest machining quality and processing flexibility. Most of these beam sources however feature relatively low average powers or high system prices. Continuous wave fiber lasers in comparison feature high average powers at moderate costs. In this work the laser power of a continuous-wave fiber laser is rapidly modulated to investigate the possibilities to improve laser surface texturing processes by periodically changing the interaction between the surface tension in the melt pool and the vapor pressure created during high power laser processing. It was found that the intermittent nature of modulated continuous wave laser radiation can improve the melt expulsion from the processing area, leading to high material removal rates and ablation efficiencies while also limiting the heat input into the substrate material.
{"title":"Laser Surface Texturing of Metals Using Dynamic Melt Expulsion by Application of Fast Modulated CW-Laser Radiation","authors":"","doi":"10.2961/jlmn.2023.02.2009","DOIUrl":"https://doi.org/10.2961/jlmn.2023.02.2009","url":null,"abstract":"Laser surface texturing of metals is usually performed using pulsed laser sources. Short and ultrashort pulsed laser systems offer the highest machining quality and processing flexibility. Most of these beam sources however feature relatively low average powers or high system prices. Continuous wave fiber lasers in comparison feature high average powers at moderate costs. In this work the laser power of a continuous-wave fiber laser is rapidly modulated to investigate the possibilities to improve laser surface texturing processes by periodically changing the interaction between the surface tension in the melt pool and the vapor pressure created during high power laser processing. It was found that the intermittent nature of modulated continuous wave laser radiation can improve the melt expulsion from the processing area, leading to high material removal rates and ablation efficiencies while also limiting the heat input into the substrate material.","PeriodicalId":54788,"journal":{"name":"Journal of Laser Micro Nanoengineering","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135388513","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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