Fabrication of hierarchical nanostructures using binary colloidal nanosphere assembly

Ethan Flores, Saurav Mohanty, Andrew Tunell, Chih-Hao Chang
{"title":"Fabrication of hierarchical nanostructures using binary colloidal nanosphere assembly","authors":"Ethan Flores, Saurav Mohanty, Andrew Tunell, Chih-Hao Chang","doi":"10.1116/6.0003027","DOIUrl":null,"url":null,"abstract":"In this paper, we investigate the self-assembly of hierarchical nanostructures using monodispersed nanospheres with two different diameters. Our approach is to use a two-step method where the assembly of larger 200 nm nanospheres is used to direct the assembly of smaller 50 nm particles. This self-assembly technique is based on Langmuir–Blodgett assembly and has low equipment cost when compared with traditional lithography methods. We examine the effects of substrate surface treatment, solution concentration ratio, and spin speeds on the quality of the hierarchical assembly. The fabricated samples are examined using optical and scanning electron microscopy to investigate assembly yield. Various defect types are identified and mitigated by process control. The ability to create more complex assembly can result in smaller features and can enhance the performance of photonics and nanostructured surfaces.","PeriodicalId":17571,"journal":{"name":"Journal of Vacuum Science and Technology","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2023-10-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Vacuum Science and Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1116/6.0003027","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

Abstract

In this paper, we investigate the self-assembly of hierarchical nanostructures using monodispersed nanospheres with two different diameters. Our approach is to use a two-step method where the assembly of larger 200 nm nanospheres is used to direct the assembly of smaller 50 nm particles. This self-assembly technique is based on Langmuir–Blodgett assembly and has low equipment cost when compared with traditional lithography methods. We examine the effects of substrate surface treatment, solution concentration ratio, and spin speeds on the quality of the hierarchical assembly. The fabricated samples are examined using optical and scanning electron microscopy to investigate assembly yield. Various defect types are identified and mitigated by process control. The ability to create more complex assembly can result in smaller features and can enhance the performance of photonics and nanostructured surfaces.
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
利用二元胶体纳米球组装制备层次化纳米结构
在本文中,我们用两种不同直径的单分散纳米球研究了分层纳米结构的自组装。我们的方法是使用两步方法,其中较大的200纳米纳米球的组装用于指导较小的50纳米颗粒的组装。这种自组装技术基于Langmuir-Blodgett组装,与传统光刻方法相比,具有较低的设备成本。我们研究了衬底表面处理、溶液浓度比和旋转速度对分层组装质量的影响。用光学显微镜和扫描电镜对制备的样品进行了检测,以研究装配成品率。通过过程控制可以识别和减轻各种缺陷类型。创造更复杂组装的能力可以产生更小的特征,并可以提高光子学和纳米结构表面的性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Interfacial reactivity in the Co/CuO samples as investigated by x-ray photoelectron spectroscopy Modification of discharge sequences to control the random dispersion of flake particles during wafer etching Effect of atomic-scale microstructures on TiZrV non-evaporable getter film activation E-mode AlGaN/GaN HEMTs using p-NiO gates Review on remote phonon scattering in transistors with metal-oxide-semiconductor structures adopting high-k gate dielectrics
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1