DongJun Jang, U-Jin Cho, Youhyeong Jeon, TaeYong Lee, RyangHa Kim, Younglae Kim, Min-Woo Kwon
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引用次数: 0
Abstract
This research presents a resistive-type hydrogen (HSUB2/SUB) gas sensor based on a composite of palladium nanoparticles (Pd-NP) decorated on 2Dmolybdenum disulfide (MoS2) layer. The sensor fabrication involves synthesizing MoSSUB2/SUB and coating Pd by DC sputtering technique. MoS2 has been adopted for its high selectivity for H2, wide operating temperature range, reliability, and low power consumption. Pd has high catalytic properties for HSUB2/SUB and performs a HSUB2/SUB adsorption mechanism through resistance transition. In this study, we propose a Pddecorated MoS2 structure and introduce the chemical resistance mechanism within the channel. The limit of detection (LOD), sensitivity and response time of the fabricated HSUB2/SUB gas sensors are optimized and analyzed. Finally, the nanocomposites network based HSUB2/SUB sensor can promote the utilization of various industries and discuss the issues in sensor applications.
期刊介绍：
Journal of Semiconductor Technology and Science is published to provide a forum for R&D people involved in every aspect of the integrated circuit technology, i.e., VLSI fabrication process technology, VLSI device technology, VLSI circuit design and other novel applications of this mass production technology. When IC was invented, these people worked together in one place. However, as the field of IC expanded, our individual knowledge became narrower, creating different branches in the technical society, which has made it more difficult to communicate as a whole. The fisherman, however, always knows that he can capture more fish at the border where warm and cold-water meet. Thus, we decided to go backwards gathering people involved in all VLSI technology in one place.
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