{"title":"Cover image from C. Loho and co-workers (Chem. Vap. Deposition 2014, 20, 152)","authors":"","doi":"10.1002/cvde.201474561","DOIUrl":null,"url":null,"abstract":"<p>The cover image illustrates CO<sub>2</sub>-laser flash evaporation of metal <i>β</i>-diketonate precursors, their decomposition, and the subsequent growth of a LiCoO<sub>2</sub> thin film. The use of CO<sub>2</sub>-laser flash evaporation in a CVD process is a novel approach for the delivery of solid precursors with low volatility.\n\n <figure>\n <div><picture>\n <source></source></picture><p></p>\n </div>\n </figure></p>","PeriodicalId":10093,"journal":{"name":"Chemical Vapor Deposition","volume":"20 4-5-6","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2014-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1002/cvde.201474561","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Chemical Vapor Deposition","FirstCategoryId":"1085","ListUrlMain":"https://onlinelibrary.wiley.com/doi/10.1002/cvde.201474561","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The cover image illustrates CO2-laser flash evaporation of metal β-diketonate precursors, their decomposition, and the subsequent growth of a LiCoO2 thin film. The use of CO2-laser flash evaporation in a CVD process is a novel approach for the delivery of solid precursors with low volatility.
期刊介绍:
Chemical Vapor Deposition (CVD) publishes Reviews, Short Communications, and Full Papers on all aspects of chemical vapor deposition and related technologies, along with other articles presenting opinion, news, conference information, and book reviews. All papers are peer-reviewed. The journal provides a unified forum for chemists, physicists, and engineers whose publications on chemical vapor deposition have in the past been spread over journals covering inorganic chemistry, materials chemistry, organometallics, applied physics and semiconductor technology, thin films, and ceramic processing.