WEAR AND ADHESION PROPERTIES OF MULTILAYER Ti/TiN ,(TiC)/TiCN/TaN THIN FILMS DEPOSITED ON Ti13Nb13Zr ALLOY BY CLOSE FIELD UNBALANCED MAGNETRON SPUTTERING

IF 1.1 Q3 METALLURGY & METALLURGICAL ENGINEERING Acta Metallurgica Slovaca Pub Date : 2023-12-13 DOI:10.36547/ams.29.4.1933

Ali Kemal Aslan, Erkan Bahçe

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Abstract

Ti13Nb13Zr alloy stands out as an alternative to Ti6Al4V alloy for orthopedic joint implant applications due to its low modulus of elasticity, high mechanical properties, high corrosion resistance, high biocompatibility and low modulus of elasticity, as well as containing no cytotoxic elements. In this study, Ti13Nb13Zr alloy was coated with TiN/TiC/TiCN/TaN multilayer thin films by pulsed-dc CFBUMS method to increase wear resistance and improve surface properties. Characterization of the deposited films were conducted by XRD, SEM, AFM, pin-on-disk, progressive scratch experiments. As a result, it is observed that all the coatings enhanced the tribological properties of the Ti13Nb13Zr alloy surface. The 20-layer TiN/TiC/TiCN/TaN multilayer coatings gave the best results for wear resistance and adhesion properties. Enhancing the interlayer number resulted in increased wear and adhesion resistance. In addition, it was determined that using TiC instead of TiN in the interlayers gave higher results regarding adhesion, wear, and mechanical properties.

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近场无平衡磁控溅射法在 Ti13Nb13Zr 合金上沉积的多层 Ti/TiN ,(TiC)/TiCN/TaN 薄膜的磨损和吸附性能

Ti13Nb13Zr 合金因其低弹性模量、高机械性能、高耐腐蚀性、高生物相容性和低弹性模量以及不含细胞毒性元素而成为骨科关节植入物的替代材料。本研究采用脉冲直流 CFBUMS 法在 Ti13Nb13Zr 合金表面镀上 TiN/TiC/TiCN/TaN 多层薄膜，以提高其耐磨性并改善其表面性能。对沉积薄膜的表征采用了 XRD、SEM、AFM、针盘实验和渐进划痕实验。结果表明，所有涂层都增强了 Ti13Nb13Zr 合金表面的摩擦学性能。20 层 TiN/TiC/TiCN/TaN 多层涂层的耐磨性和附着力性能最好。增加层间数量可提高耐磨性和附着力。此外，研究还发现，在夹层中使用 TiC 而不是 TiN 可以获得更高的附着力、耐磨性和机械性能。

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