Keita Kuga, Md Mehdee Hasan Mahfuz, Takeo Matsuki, Takanobu Watanabe
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引用次数: 0
Abstract
The performance of a cavity-free micro thermoelectric generator (TEG) consists of Si nanowires (Si-NWs) has been investigated in this research. In the cavity free structure, one side of TEG is heated by the structure of metal overlayer, called Heat Guide (HG), to supply heat selectively to specific microregions within the device. Thus, heat energy flows in the perpendicular direction which forms steep temperature gradient in the NWs. However, the performance can be varied with the various thickness of HG. In this work, the impact of HG structure of an integrated TEG was experimentally demonstrated on the power generation performance. Higher metal HG thickness and thick interlayer dielectric (ILD) thickness exhibit higher power generation performance with the integrated device.
期刊介绍:
The Japanese Journal of Applied Physics (JJAP) is an international journal for the advancement and dissemination of knowledge in all fields of applied physics. JJAP is a sister journal of the Applied Physics Express (APEX) and is published by IOP Publishing Ltd on behalf of the Japan Society of Applied Physics (JSAP).
JJAP publishes articles that significantly contribute to the advancements in the applications of physical principles as well as in the understanding of physics in view of particular applications in mind. Subjects covered by JJAP include the following fields:
• Semiconductors, dielectrics, and organic materials
• Photonics, quantum electronics, optics, and spectroscopy
• Spintronics, superconductivity, and strongly correlated materials
• Device physics including quantum information processing
• Physics-based circuits and systems
• Nanoscale science and technology
• Crystal growth, surfaces, interfaces, thin films, and bulk materials
• Plasmas, applied atomic and molecular physics, and applied nuclear physics
• Device processing, fabrication and measurement technologies, and instrumentation
• Cross-disciplinary areas such as bioelectronics/photonics, biosensing, environmental/energy technologies, and MEMS