{"title":"Formation conditions of the tungsten porous thin film with pulsed laser deposition under various gas atmosphere","authors":"S. Kodate, Q. Shi and S. Kajita","doi":"10.35848/1347-4065/ad759a","DOIUrl":null,"url":null,"abstract":"Pulsed laser deposition (PLD) under gas atmospheres has been used to fabricate thin films for various applications. In this study, PLD was performed under various gas atmospheres (helium, oxygen, and argon) using tungsten (W) to investigate the morphology of thin films. Various types of structures were formed, including uniform, nanoparticles, and columnar structures. In particular, the substrate fabricated at an argon pressure of 100 Pa had a high porosity and a low light reflectance in the 200–1400 nm wavelength range. In addition, it was shown that the growth of the thin film thickness was non-linear with respect to time, and the formation of a fuzz-like structure may be influenced by particle diffusion in the gas phase and on the substrate.","PeriodicalId":14741,"journal":{"name":"Japanese Journal of Applied Physics","volume":"190 1","pages":""},"PeriodicalIF":1.5000,"publicationDate":"2024-09-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Japanese Journal of Applied Physics","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.35848/1347-4065/ad759a","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"PHYSICS, APPLIED","Score":null,"Total":0}
引用次数: 0
Abstract
Pulsed laser deposition (PLD) under gas atmospheres has been used to fabricate thin films for various applications. In this study, PLD was performed under various gas atmospheres (helium, oxygen, and argon) using tungsten (W) to investigate the morphology of thin films. Various types of structures were formed, including uniform, nanoparticles, and columnar structures. In particular, the substrate fabricated at an argon pressure of 100 Pa had a high porosity and a low light reflectance in the 200–1400 nm wavelength range. In addition, it was shown that the growth of the thin film thickness was non-linear with respect to time, and the formation of a fuzz-like structure may be influenced by particle diffusion in the gas phase and on the substrate.
期刊介绍：
The Japanese Journal of Applied Physics (JJAP) is an international journal for the advancement and dissemination of knowledge in all fields of applied physics. JJAP is a sister journal of the Applied Physics Express (APEX) and is published by IOP Publishing Ltd on behalf of the Japan Society of Applied Physics (JSAP).
JJAP publishes articles that significantly contribute to the advancements in the applications of physical principles as well as in the understanding of physics in view of particular applications in mind. Subjects covered by JJAP include the following fields:
• Semiconductors, dielectrics, and organic materials
• Photonics, quantum electronics, optics, and spectroscopy
• Spintronics, superconductivity, and strongly correlated materials
• Device physics including quantum information processing
• Physics-based circuits and systems
• Nanoscale science and technology
• Crystal growth, surfaces, interfaces, thin films, and bulk materials
• Plasmas, applied atomic and molecular physics, and applied nuclear physics
• Device processing, fabrication and measurement technologies, and instrumentation
• Cross-disciplinary areas such as bioelectronics/photonics, biosensing, environmental/energy technologies, and MEMS
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