S. O. Mihin, D. N. Egorov, O. N. Koshkur, A. E. Romanov
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引用次数: 0
Abstract
The article describes the technological process of manufacturing a sorption-capacitive humidity sensor based on thin films of a sorbing moisture-sensitive layer implemented by microarc oxidation and a moisture-permeable electrode implemented by magnetron sputtering. The paper defines the technical requirements for the components of a sorption-capacitive humidity sensor. The electrical parameters of the moisture-sensitive layer are investigated depending on the component composition of the electrolyte and the modes of microarc oxidation. The geometrical parameters of the moisture-sensitive layer and the moisture-permeable electrode are presented, their structure and pore distribution are shown.
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